The Topology Within Recirculating Flow in the Atomic Layer Deposition Thin Film Process

Jen, Tien-Chen; Coetzee, Rigardt; Bhamjee, M.; Hoenselaar, Damon

doi:10.1115/1.0004047v

2021

DOI: 10.1115/1.0004047v

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The Topology Within Recirculating Flow in the Atomic Layer Deposition Thin Film Process

Tien-Chen Jen¹,

Rigardt Coetzee²,

M. Bhamjee³

et al.

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The Topology Within Recirculating Flow in the Atomic Layer Deposition Thin Film Process

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