2015
DOI: 10.1016/j.mssp.2014.01.031
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The temperature dependence on the electrical properties of dysprosium oxide deposited on p-Si substrate

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Cited by 14 publications
(7 citation statements)
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“…Hence, dielectric constant increases due to such behavior of space charges at low frequencies [27][28][29][30][31][32].…”
Section: Resultsmentioning
confidence: 99%
“…Hence, dielectric constant increases due to such behavior of space charges at low frequencies [27][28][29][30][31][32].…”
Section: Resultsmentioning
confidence: 99%
“…Thus, it can be said that the correction for the series resistance is particularly important in conductance measurements. Furthermore, the values of dielectric loss tangent and ac conductivity strongly depend on applied voltage and the thickness of the interfacial oxide layer [1][2][3][14][15][16][17][18][19][20][21][22][23]. Moreover, the low value of dielectric constant could be due to the formation of the native oxides related to Ga and As during devices fabrication processes.…”
Section: Resultsmentioning
confidence: 99%
“…Therefore, the SiO 2 must be replaced with other gate dielectrics [10][11][12][13][14][15][16][17][18][19][20][21][22][23][24], that is, the reduction of gate dimensions requires decreasing oxide thickness to prevent the short channel effect and therefore the undesirable gate leakage current is substantial and increases exponentially with decreasing thickness. This calls for other dielectrics with much higher dielectric constants, that is, the high-κ metallic gate oxides which allow maintenance of the gate oxide capacitance needed for reducing short channel effects [10][11][12][13][14][15][16][17][18][19][20][21][22][23][24]. Wu and colleagues have reported [10] that the atomic layer deposition (ALD) method is the most widely used technique in spite of the fact that other methods have also led to attractive results, and that the ALD has improved the interface quality and reduced the defects density in high-κ films.…”
Section: Introductionmentioning
confidence: 99%
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“…At low frequencies, a plateau appears for each temperature and reveals low frequency dispersion phenomena. The origin of the frequency-dependence of conductance lies in the relaxation phenomena arising due to mobile charge carriers [57].…”
Section: Electrical Propertiesmentioning
confidence: 99%