2014
DOI: 10.1016/j.egypro.2013.12.019
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The Surface Texturing of Monocrystalline Silicon with NH4OH and Ion Implantation for Applications in Solar Cells Compatible with CMOS Technology

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Cited by 14 publications
(12 citation statements)
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“…The worse the quality of the front contact, the greater the decrease in the cell parameters [46]. Silva et al [54] indicated that the device fabrication processes is important for the solar cell efficiency. For example, the silicon surface texturing process can reduce the optical reflection by increasing the surface absorption area of the incident radiation on the cell and finally increase the cell efficiency.…”
Section: Cell Structurementioning
confidence: 99%
“…The worse the quality of the front contact, the greater the decrease in the cell parameters [46]. Silva et al [54] indicated that the device fabrication processes is important for the solar cell efficiency. For example, the silicon surface texturing process can reduce the optical reflection by increasing the surface absorption area of the incident radiation on the cell and finally increase the cell efficiency.…”
Section: Cell Structurementioning
confidence: 99%
“…These structures have the advantage of decreasing the reflectance, resulting in improved light trapping and a subsequent higher photo conversion current in the solar cells. Several chemical baths can be used to generate these microstructures, such as Na2CO3/NaHCO3 solutions [7][8], hydroxide (NaOH), isopropyl alcohol (IPA) [9], NH4OH [10], and NaOCl [11]. The alkaline solutions operate anisotropically on crystalline silicon due to the difference in etching rates between the (100) and (111) planes.…”
Section: Introductionmentioning
confidence: 99%
“…Texturing of silicon (Si) surfaces is important for several device fabrication processes which are advantageous for high speed capacitors, MOSFETs, high efficiency solar cells [1,2,3], CMOS [4], MEMS devices [5], optical switches [6], nanoprobes, laser cavities, etc. [7,8,9,10,11].…”
Section: Introductionmentioning
confidence: 99%
“…Texturing of silicon (Si) surfaces is important for several device fabrication processes, which are advantageous for high speed capacitors, MOSFETs, high efficiency solar cells [1][2][3], CMOS [4], MEMS devices [5], optical switches [6], nanoprobes, laser cavities, etc [7][8][9][10][11]. Anisotropic etching is a preferred texturing method owing to the presence of minimum defect densities and surface defects [12,13] on the textured surface by changing the local etch rate [14,15].…”
Section: Introductionmentioning
confidence: 99%