The Surface Modification of ZrO2 Film by Zr/Nb Ion Implantation and First-Principles Calculation
Yuan Gao,
Luyao Wang,
Dejun Li
Abstract:Zirconium dioxide (ZrO2) possesses numerous advantages such as high mechanical strength, a low friction coefficient, excellent optical properties, and an extended lifespan. Consequently, ZrO2 has a broad research foundation and practical significance in functional films and wear-resistant coatings. However, it suffers from brittleness and low ductility when used as a bio-coating material. In this study, a ZrO2 film was fabricated on Si (100) and titanium alloy substrates using a magnetron sputtering system. Su… Show more
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