The surface acoustic wave velocities and electro-mechanical coupling coefficients of AlN thin films

Xu, Ouyang; Qu, Xixin; Zhang, Weixiao

doi:10.1109/icpadm.1988.38351

Proceedings., Second International Conference on Properties and Applications of Dielectric Materials

DOI: 10.1109/icpadm.1988.38351

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The surface acoustic wave velocities and electro-mechanical coupling coefficients of AlN thin films

Ouyang Xu¹,

Xixin Qu²,

Weixiao Zhang³

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The surface acoustic wave velocities and electro-mechanical coupling coefficients of AlN thin films

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References 4 publications

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