The Success of Fabrication of Pure SmFe2 Phase Film with Outstanding Perpendicular Magnetic Anisotropy
Shijie Liao,
Fang Wang,
Hui Shen
et al.
Abstract:This study used DC magnetron sputtering technology to fabricate Sm-Fe films and systematically investigated the phase transition behavior of Sm-Fe films with different Fe ratios. It was found that at higher Fe content, the films consisted of Sm2Fe17 or SmFe7 phases; as Fe content decreased, the films were mainly composed of SmFe3 or SmFe2 phases; at higher Sm content, the films primarily consisted of Sm phase. Sm is prone to volatilization at high temperatures, so Ta was used as a capping layer to effectively … Show more
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