2017
DOI: 10.1016/j.snb.2016.12.115
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The study on methane sensing with high-temperature low-power CMOS compatible silicon microheater

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Cited by 9 publications
(7 citation statements)
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“…As the stability of the methane carrier catalytic element is greater than or equal to 7 d, the coal mine safety regulations formulated by the National Administration of Coal Mine Safety require that methane sensors and portable methane detection alarm devices using carrier catalytic elements must be adjusted with air samples and corresponding methane standard gas samples every seven days [20]. The adjustment of the mine gas sensor is divided into two steps: (1) zero-point adjustment, that is, in fresh air observe whether the sensor reading is 0; (2) in the standard gas sample (for example, the gas concentration is 2%), make sure the reading of the sensor is consistent with the concentration of the standard gas sample. Both of these scenarios will be encountered in actual mine surveys.…”
Section: Gas Sensor and Smart Miner's Lampmentioning
confidence: 99%
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“…As the stability of the methane carrier catalytic element is greater than or equal to 7 d, the coal mine safety regulations formulated by the National Administration of Coal Mine Safety require that methane sensors and portable methane detection alarm devices using carrier catalytic elements must be adjusted with air samples and corresponding methane standard gas samples every seven days [20]. The adjustment of the mine gas sensor is divided into two steps: (1) zero-point adjustment, that is, in fresh air observe whether the sensor reading is 0; (2) in the standard gas sample (for example, the gas concentration is 2%), make sure the reading of the sensor is consistent with the concentration of the standard gas sample. Both of these scenarios will be encountered in actual mine surveys.…”
Section: Gas Sensor and Smart Miner's Lampmentioning
confidence: 99%
“…Most of these sensors show an electrochemical reaction when exposed to a specific gas. Ma H. et al proposed a high-temperature silicon cantilever microheater with low power consumption to detect low concentrations of methane gas [ 2 ]. All these solid-state gas sensors are inexpensive, small, and suitable for mobile measurements.…”
Section: Introductionmentioning
confidence: 99%
“…McDaniel et al presented a dynamic, double ended calibration routine in response to site-specific challenges and constraints for calibration considerations [25]. A temperature measurement was developed in a single pass glass absorption cell with a length of 20 cm by Ma et al [26]. Chuanliang et al used technique for trace gas detection by tunable diode laser absorption spectroscopy, in which the spectral signals at different pressures and temperatures were acquired [27].…”
Section: Detection Technology the Accuracy Of Temperaturementioning
confidence: 99%
“…Commercially available electrochemical on-chip sensor technology is based on a catalytic action, often driven by auxiliary temperature. The micro-hotplate and micro heaters solutions, partially using advantages of MEMS fabrication technology, were proposed to lower the energy demands for these catalytic sensors [ 144 ]. This class of gas sensors still suffers from stability and degradation issues [ 145 ], and still needs improvements regarding their energy efficiency [ 146 ].…”
Section: Emerging On-chip Technologies For the Air Quality Measurementioning
confidence: 99%