2019
DOI: 10.22452/mjs.sp2019no3.1
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The Study of Plasma Parameter and the Effect of Experiment Set Up Modification by Using Modelling Software

Abstract: Plasma diagnosis has done by using Langmuir probe and software modeling. COMSOL and JMAG software were employed to characterize the electron density and identifying the set up effect in the plasma system. First, the COMSOL software was employed to simulate the behavior of electron density. The pressure and DC-bias voltage were varied during the simulation process. The DC bias voltage was varied in the range-200 V to-600V. The pressure was also varied in the range 30 to 80 Pa. The high electron density was gene… Show more

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“…Simulasi biasanya digunakan sebagai kegiatan praeksperimen yang berbiaya mahal atau penyederhaan sistem yang rumit [19], [20]. Seringkali, keberhasilan simulasi divalidasi dengan hasil eksperimen sebelum dilakukan analisa lebih mendalam terhadap variabelvariabel fisis yang digunakan [21].…”
Section: Pendahuluanunclassified
“…Simulasi biasanya digunakan sebagai kegiatan praeksperimen yang berbiaya mahal atau penyederhaan sistem yang rumit [19], [20]. Seringkali, keberhasilan simulasi divalidasi dengan hasil eksperimen sebelum dilakukan analisa lebih mendalam terhadap variabelvariabel fisis yang digunakan [21].…”
Section: Pendahuluanunclassified