The study and fabrication of DLC micropattern on roll mold

Abstract

Diamond-like carbon (DLC) coating is becoming a promising protective coating layers due to its superior properties. In this study, instead of protective coating, DLC film was applied as the only component for micropattern then etched with lithography and lift-off process selectively. Furthermore, DLC film has been fabricated on aluminum roll mold. Then UV curing resin was applied to form the pattern on the polyethylene terephthalate (PET) film. The dimension and formation of the DLC micropattern on roll mold were analyzed. Moreover, the Raman spectroscopic of nitrogen-doped DLC film was analyzed.