The strip acoustic surface waveguide: Comparison between measurement and theory

Yen, K.H.; Oliner, A.A.

doi:10.1063/1.88783

Cited by 9 publications

(2 citation statements)

References 6 publications

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“…Oliner [9] developed a method based on microwave network theory for calculating acoustic modes in rectangular waveguides on substrates. This method was pursued in a number of subsequent publications, including those of Oliner et al [10,11], Li et al [12], and Yen and Oliner [13]. Tu and Farnell [14] used a variational technique with polynomial-series approximation functions to calculate modes in rectangular waveguides on substrates.…”

Section: Introductionmentioning

confidence: 99%

Vibrational modes of nanolines

2008

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Brillouin-light-scattering spectra previously have been shown to provide information on acoustic modes of polymeric lines fabricated by nanoimprint lithography. Finite-element methods for modeling such modes are presented here. These methods provide a theoretical framework for determining elastic constants and dimensions of nanolines from measured spectra in the low gigahertz range. To make the calculations feasible for future incorporation in inversion algorithms, two approximations of the boundary conditions are employed in the calculations: the rigidity of the nanoline/substrate interface and sinusoidal variation of displacements along the nanoline length. The accuracy of these approximations is evaluated as a function of wavenumber and frequency. The great advantage of finite-element methods over other methods previously employed for nanolines is the ability to model any cross-sectional geometry. Dispersion curves and displacement patterns are calculated for modes of polymethyl methacrylate nanolines with cross-sectional dimensions of 65 nm × 140 nm and rectangular or semicircular tops. The vibrational displacements and dispersion curves are qualitatively similar for the two geometries and include a series of flexural, Rayleigh-like, and Sezawa-like modes.

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Section: Introductionmentioning

confidence: 99%

Vibrational modes of nanolines

2008

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“…Flat overlay waveguides may be the most well known, as they have been thoroughly analyzed and experimentally utilized (Yen et al, 1976). The central region in each case is considered the relatively low-velocity (slow) wave region, so that the SAW field will be laterally confined in the central region: any SAW exiting the slow region will be forced to speed up, thus caused to turn back into the slow region and away from the fast region.…”

Section: Types Of Waveguidesmentioning

confidence: 99%

A review: controlling the propagation of surface acoustic waves via waveguides for potential use in acoustofluidics

Mei

Friend

2020

Mechanical Engineering Reviews

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This paper presents a review of waveguides on lithium niobate for surface acoustic waves (SAWs), including in particular the classic literature on the topic with the intent of renewing interest in them in the context of potential applications in the burgeoning discipline of micro to nano-scale acoustofluidics. From the fundamentals of the piezoelectric effect we describe interdigital electrodes and how they generate acoustic waves, consider focusing interdigital electrodes as a simple means of laterally confining the acoustic energy propagating across a substrate, and then quickly move to waveguiding structures that provide confinement by defining either a region of slow wave velocity or a physically isolated structure. The ability to steer acoustic waves using these waveguides is considered. The many analytical, computational, and experimental tools devised by past investigators to design them are discussed in detail, as are the relative advantages and disadvantages of the waveguide designs considered over the years.The most popular materials that are used to make SAW devices include quartz, lithium tantalate (LT) LiTaO 3 and lithium niobate (LN) LiNbO 3 . Others include gallium arsenide (GaAs), cadmium sulfide (CdS), zinc oxide (ZnO), lithium tetraborate (Li 2 B 4 O 7 ), and lanthanum gallium silicate (La 3 Ga 5 SiO 12 ) (Thurston et al., 1998). Due to the crystalline structure of these materials, the type of wave generated is strongly dependent on the choice and orientation of the material as discussed above. Lithium niobate has been the preferred material for devices requiring high efficiency, as it possesses a relatively large electromechanical coupling coefficient open-circuit) and v m is the SAW velocity along a short-circuited surface. Of the various cuts possible, the 131 • Y-rotated cut for X-propagating SAW in LN was found to have the highest electromechanical coupling coefficient for SAW (Slobodnik et al., 1970), relative to other cuts in LN and other choices of single-crystal piezoelectric media. In 1976, Shibayama et al. conducted experiments to determine the optimum rotated Y-cut of LN to generate "true" SAWs and concluded that the 127.86 • Y-rotated choice for X-propagating SAW in lithium niobate (128 • YX LN) reduced the generation of other parasitic waves and retained most of the electromechanical coupling and low insertion loss observed in the 131 • Y-rotated cut of LN. Generating SAW on lithium niobateInterdigital transducers are one of the most widely used devices that generate and detect SAWs. The first and simplest IDTs (White et al., 1965) consisted of straight rectangular metal bars-fingers-deposited on the surface of a piezoelectric substrate. Alternately connected on their end to common electrodes or bus bars, the fingers appear as depicted in Fig. 1. An array of electric fields of alternating direction is created between the transducer finger pairs, and thus in turn induces alternating regions of compression and tension in the substrate. Each finger pair therefore produces displacemen...

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Waveguides for surface waves

Oliner¹

1978

Topics in Applied Physics

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The strip acoustic surface waveguide: Comparison between measurement and theory

Cited by 9 publications

References 6 publications

Vibrational modes of nanolines

Vibrational modes of nanolines

A review: controlling the propagation of surface acoustic waves via waveguides for potential use in acoustofluidics

Waveguides for surface waves

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