The sputtering performance of Ag sputtering targets with different microstructure

Ning, Zheda; Wang, Yiqing; Li, Sixie; Tang, Ke; Wen, Ming

doi:10.1016/j.vacuum.2023.111888

Cited by 5 publications

(2 citation statements)

References 26 publications

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“…The 2D and 3D AFM images presented in Figure 5a-e show the effect of thickness and Ag incorporation on the surface topography. The AFM analyses showed the same characteristic observed in the SEM analyses already presented and those reported in previous studies [31,32], where a more intense distribution of particulates is noted at high deposition rates. The results are compatible with those of studies presented in the literature The agglomeration of particulates promoted by the increase in the Ag evaporation rate promotes an increase in the root mean square roughness caused by silver segregation on the surface.…”

Section: The Roughness-rms and Thickness Of Tin-ag Coatingssupporting

confidence: 87%

Ag Behavior on TiN Thin Films for Decorative Coatings

Arruda,

Mansano,

Ordonez

et al. 2024

Coatings

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TiN-Ag ceramic coatings deposited by magnetron sputtering on silicon wafers and AISI F138 stainless-steel substrates with different Ag concentrations were evaluated for their application as decorative coatings. The results obtained indicated an almost linear increase in the thickness and roughness of the film as a function of the increase in the silver content of the film. For Ag concentrations greater than (8.3 ± 0.5) at %, a matte/satin finish was observed, i.e., a dull surface, produced by the agglomeration of particulates and the increase in roughness, respectively, which was corroborated by SEM and AFM analyses. The EDS analyses indicated particles with a high concentration of silver, but the elements titanium and nitrogen were also observed, indicating the formation of the TiN-Ag coating. The L*a*b* parameters in the CIELab color space were evaluated. No major variations were observed for coatings A and B (Ag concentrations of (4.1 ± 0.4) and (6.3 ± 1.2) at %, respectively). When the Ag content increased substantially, there was a corresponding decrease in L* values, as well as a shift in red reflectance. Furthermore, unwanted changes in the visual appearance and resistance to accelerated corrosion (salt spray) were also analyzed, as these factors compromised the film’s aesthetics in decorative applications.

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Section: The Roughness-rms and Thickness Of Tin-ag Coatingssupporting

confidence: 87%

Ag Behavior on TiN Thin Films for Decorative Coatings

Arruda,

Mansano,

Ordonez

et al. 2024

Coatings

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“…Therefore, the Ni 3+ content was adjusted to achieve the optimal conditions of improved transmittance, resistivity, crystallinity, and mobility. With regard to adjusting the properties of thin films, recent vacuum studies report various techniques such as sputtering targets with different microstructures, decreasing the heating rate, co-sputtering, and post-annealing [21][22][23][24].…”

Section: Of 21mentioning

confidence: 99%

Effect of Oxygen-Evaporation-Preventative Post-Annealing Gas Conditions on NiO Thin Films

Kim,

Hong

2023

Coatings

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In this study, NiO films were fabricated through radio frequency sputtering with various oxygen flow rates and processed via rapid thermal annealing under Ar, O2, and N2 atmospheres. The electrical, optical, and crystallographic properties of the NiO films were influenced by their oxygen content in each film. As the oxygen content, carrier concentration, and resistivity increased, transmittance and mobility decreased. The carrier mobility of the NiO film in the p-type layer of the photodetector requires improvement. Rapid thermal annealing (RTA) has been widely used to improve the crystallinity and mobility of films. However, the reduction in oxygen content during RTA causes a decrease in the carrier concentration and transmittance of NiO films. Regarding the aim of preventing a reduction in oxygen content in the NiO films due to the RTA process, an O2 atmosphere (compared with Ar and N2 atmospheres) was identified as the optimal condition for mobility (3.42 cm2/V·s) and transmittance (50%).

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