2021
DOI: 10.1016/j.apsusc.2021.149974
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The sputter-based synthesis of tantalum oxynitride nanoparticles with architecture and bandgap controlled by design

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Cited by 11 publications
(13 citation statements)
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“…In both cases, lognormal size distribution was chosen which corresponds to typical size distributions of gas-aggregated NPs. 44 Zr NPs are characterized by the mean size (diameter) of 21 ± 2 nm. ZrN NPs have the mean size (cube edge length) of 22 ± 3 nm.…”
Section: Resultsmentioning
confidence: 99%
“…In both cases, lognormal size distribution was chosen which corresponds to typical size distributions of gas-aggregated NPs. 44 Zr NPs are characterized by the mean size (diameter) of 21 ± 2 nm. ZrN NPs have the mean size (cube edge length) of 22 ± 3 nm.…”
Section: Resultsmentioning
confidence: 99%
“…The spectra were referenced to the adventitious C 1s peak at 285.0 eV. The XPS spectra of Ti 2p, Zr 3d, and Hf 4f were deconvoluted into several spin–orbit split doublets with specific constraints set in the fitting procedure, similar to ref . The area ratio of the two spin orbit peaks was fixed in accordance with the degeneracy of the spin states: p 3/2 /p 1/2 = 2/1, d 5/2 /d 3/2 = 3/2, and f 7/2 /f 5/2 = 4/3.…”
Section: Methodsmentioning
confidence: 99%
“…Conventional inert gas magnetron sputtering has for a long time been known as a method to produce metal/ceramics/polymer-based nanocomposite coatings, and it has also been adapted to produce NPs under elevated pressures. We have also shown that gas-aggregated NPs can be directly loaded into liquids to produce nanofluids, provided that the liquids are compatible with vacuum. , On the other hand, reactive sputtering was extensively used to deposit thin films of MeN, often requiring hot substrates or postdeposition annealing to produce thin films of high quality. Importantly, reactive sputtering was not known for the synthesis of nitride NPs until recently, when our group managed to produce TaNO NPs by sputtering the Ta target in gas mixtures of Ar and N 2 , opening a route toward the synthesis of other metal nitride NPs . The primary goal of this investigation is to transfer the already accumulated knowledge on the synthesis of plasmonic TiN, ZrN, and HfN nanofluids using reactive magnetron sputtering, gas phase aggregation, and deposition onto liquids without the use of toxic chemicals or high-temperature annealing.…”
Section: Introductionmentioning
confidence: 99%
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“…In addition to noble metals, NPs of more affordable transition metals can also be synthesized by the sputter-based method; however, they are more reactive and prone to oxidation. Although reports on the use of oxidized metal NPs for SALDI-MS have recently appeared, , there is still a considerable knowledge gap on their benefits or limitations.…”
Section: Introductionmentioning
confidence: 99%