1993
DOI: 10.1063/1.1144200
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The scanning Kelvin microscope

Abstract: This article describes a new instrument to monitor simultaneously the topography and the contact potential difference between the sample and the tip. This so-called scanning Kelvin microscope has a lateral resolution better than 5 μm. The control of distance between the Kelvin probe and the sample during the scan is realized using the ratio of two harmonics of the measured displacement current. The influence of the geometry of the Kelvin electrode on the time dependence and the frequency spectrum of the displa… Show more

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Cited by 43 publications
(16 citation statements)
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“…For controlling the distance various methods have been proposed: The Kelvin probes of Baumga¨rtner et al [20,21] and of Baikie et al [22] use the displacement current itself to keep the distance constant. In this way both instruments are able to register at the same time the local topography and the displacement current.…”
Section: Pacs: 6116c; 7330mentioning
confidence: 99%
“…For controlling the distance various methods have been proposed: The Kelvin probes of Baumga¨rtner et al [20,21] and of Baikie et al [22] use the displacement current itself to keep the distance constant. In this way both instruments are able to register at the same time the local topography and the displacement current.…”
Section: Pacs: 6116c; 7330mentioning
confidence: 99%
“…erhalten werden. Weitere Begriffe, die im Zusammenhang mit der EFM existieren, sind die Scanning Surface Potential Microscopy (SSPM)146 und die Scanning Kelvin Probe Force Microscopy (SKFM)147 (oder Scanning Kelvin Microscopy (SKM)148), die auf dem Prinzip der SMM beruhen und in der Lage sind, Oberflächenpotentiale und Kontaktpotentialunterschiede (CPDs) abzubilden.…”
Section: üBerblick üBer Die Spm‐technikenunclassified
“…[7][8][9][10][11][12] To access mm ranges, either their dimensions are inconveniently large, their deformation has to be amplified by lever systems or they have to be combined with multimorph elements. 13 In addition problems inherent to piezoelectric ceramics like creep, hysteresis and nonlinearity become more and more important, the larger the excursion of the actuators and the lower the scan rates are.…”
Section: Introductionmentioning
confidence: 99%