This work investigates the interdiffusion dynamics in self-assembled InAs/ InP͑001͒ quantum dots ͑QDs͒ subjected to rapid thermal annealing in the 600-775°C temperature range. We compare two QD samples capped with InP grown at either optimal or reduced temperature to induce grown-in defects. Atomic interdiffusion is assessed by using photoluminescence measurements in conjunction with tight-binding calculations. By assuming Fickian diffusion, the interdiffusion lengths L I are determined as a function of annealing conditions from the comparison of the measured optical transition energies with those calculated for InP / InAs 1−x P x / InP quantum wells with graded interfaces. L I values are then analyzed using a one-dimensional interdiffusion model that accounts for both the transport of nonequilibrium concentrations of P interstitials from the InP capping layer to the InAs active region and the P-As substitution in the QD vicinity. It is demonstrated that each process is characterized by a diffusion coefficient D ͑i͒ given by D ͑i͒ = D 0 ͑i͒ exp͑−E a ͑i͒ / k B T a ͒. The activation energy and pre-exponential factor for P interstitial diffusion in the InP matrix are E a ͑P-InP͒ = 2.7Ϯ 0.3 eV and D 0 ͑P-InP͒ =10 3.6Ϯ0.9 cm 2 s −1 , which are independent of the InP growth conditions. For the P-As substitution process, E a ͑P-As͒ = 2.3Ϯ 0.2 eV and ͑c o / n o ͒D 0 ͑P-As͒ ϳ 10 −5 −10 −4 cm 2 s −1 , which depend on the QD height and concentration of grown-in defects ͑c o / n o ͒.