“…Knowledge of the charge states of monatomic hydrogen (H), and other deep‐level defects in Si, has been found to be crucial in understanding the prevailing forms [ 1,2 ] and transport [ 3,4 ] of H in Si, the interactions between H and dissolved transition metals in Si, [ 5–11 ] as well as other point‐defect reactions in Si. [ 12–15 ] A unified model for predicting the charge states of H and other deep‐level defects in Si was described in our previous works. [ 16,17 ] Four models in the literature 1) the Fermi distribution, 2) the Shockley–Last model, [ 18 ] 3) the Shockley–Read–Hall (SRH) model, [ 19,20 ] and 4) the Sah–Shockley model [ 21 ] were summarized by the general occupancy ratio, which was demonstrated to universally apply to the charge state prediction of both mono‐ and multivalent defects in both thermal equilibrium and non‐equilibrium steady‐state conditions.…”