This
paper reports a microplasma-based planar process for as-grown carbon
nanotube (CNT) forests to produce macroscopically flat top surfaces
over different scales. This noncontact process is based on microscale
removal of CNTs driven by pulsed electrical discharge generated at
the interface between the forest surface and a stainless-steel planar
electrode, achieving controlled subtractive planarization of the forest
structure while maintaining the CNTs’ alignment. Forest samples
with large surface areas of up to 26 mm2 with the largest
height variations of ∼1 mm are successfully processed to demonstrate
improvements by up to ∼60× in the height uniformity of
the forests and ∼30× in the parallelism of their top surfaces
with the substrate planes. Elemental analyses suggest that the contamination
from the electrode material is minor, or negligibly small when the
discharge process does not experience short-circuit events that can
lead to damaging irregular arcs. The promising results obtained in
this work are expected to pave the way for studying the properties
of the CNT forest further and promote its application in areas where
height uniformity is of prime interest, such as in electron emission
devices.