In this paper, based on the exact Voigt profile we obtained, we derive the theory of resonance escape factors of plasma resonance lines, for both Lorentzian profile and Voigt profile. The oscillator strength, the number density of the absorbing atoms in the ground state, and the optical depth in the line center are discussed. As an example, the helium He I 1083.0 nm, lithium Li I 670.970 nm and carbon C I 111.74 nm are discussed for infrared, visible and ultraviolet regions. The results we calculated are in good agreement with the experimental results. These calculations will be significant in the theoretical analysis of plasma.The resonance escape factor is introduced to study the reabsorption of radiation in optical excitation in atom absorption measurements. The value of this factor, which approximately accounts for line self-absorption in a given gas, depends on the nature and geometry (diameter) of the gas. The escape factor also depends on the pressure and the profile of the spectral lines [1]. Under these conditions the value of the escape factor cannot be fixed. Moreover, it is a well-known fact that most laboratory gases are optically thin in most parts of the spectrum except for resonance radiation lines. The resonance radiation escape factor Λ r must appear as an additional parameter in arc gas. Computations and measurements of the optical escape factor representing the mean probability of photon escape have previously been developed [2−4].Generally, escape factors have been used in two similar situations to model the radiation transfer of spectral lines. In one situation, an escape factor multiplies the emission expected from optically thin plasma to allow for the effect of opacity on the emitted lines. In the other, an escape factor is a parameter that multiplies the radiative transition probability to allow for the effect of photo-excitation on population densities [5]. We calculated the resonance escape factor of helium plasma in the infrared region and obtained useful results [6].The Voigt profile function results from the convolution of the Gaussian profile and the Lorentzian profile. This function is interesting because it appears in a wide range of fields in physics and chemistry. For example, in plasma physics it describes the dispersion relation, and similar aspects appear in astrophysics and in optical spectroscopy. In atomic spectral analysis, the observed atomic spectral emission line even under the highest resolution does not correspond to a monochromatic line, but rather may be considered as an intensity versus frequency distribution with an intensity maximum at a central frequency dropping off to zero intensity at some interval on either side. There are several factors that determine the broadening of spectral lines, including the natural line width, Doppler broadening, pressure broadening, Stark and Zeeman broadening, self-absorption and self-reversal effects in the source, and hyperfine structure and isotope