The research of RF MEMS switch for vehicle-carried radio frequency communication

Abstract

With the automotive electronics technique getting the fast development, the wireless communication technique on vehicles have the huge market potential. This paper takes the cantilever beam MEMS switch as an example to discuss mechanical principle and function simulation of the RF MEMS switch in Vehicle-carried radio frequency communication, we select three kinds of the cantilever beam with different section to analyze their switch characteristic, and to compute and use the software of ANSYS to carry out multiphysical coupling analysis and simulation. The relation between the distortion of the cantilever beam and the threshold voltage and the inherent frequency of three kinds of the beam is discussed. The results provide a good theoretical help in designing various high performance RF MEMS switches with the variational section beam.