The relationship between chemical structure and dielectric properties of plasma-enhanced chemical vapor deposited polymer thin films

Jiang, Hao; Hong, Lianggou; Venkatasubramanian, N.; Grant, John T.; Eyink, Kurt G.; Wiacek, Kevin; Fries-Carr, S.; Enlow, Jesse; Bunning, Timothy J.

doi:10.1016/j.tsf.2006.10.126

Cited by 53 publications

(34 citation statements)

References 31 publications

(38 reference statements)

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“…From the device perspective, this means that devices containing cis−β−ocimene dielectric films would experience relatively low leakage currents through the material. Independent of film thickness and deposition power, the field at which breakdown occurred, F b was above 1.2 MV cm −1 , which is comparable to that reported for plasma-deposited polypyrrole, at 1.5 MV cm −1 43, linalyl acetate, at 1.8 MV cm −116 , or octafluorocylcobutane, at 2 ± 0.5 MV cm −1 46. It has previously been shown that the F b of plasma-deposited thin film, in that instance benzene, can be significantly enhanced through fine-tuning of deposition parameters, e.g.…”

Section: Resultssupporting

confidence: 75%

“…It has previously been shown that the F b of plasma-deposited thin film, in that instance benzene, can be significantly enhanced through fine-tuning of deposition parameters, e.g. where monomer is introduced into the deposition reactor, deposition rate and deposition pressure, etc., which presents an opportunity to further optimise the F b of cis−β−ocimene films46.…”

Section: Resultsmentioning

confidence: 99%

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Plant-derived cis-β-ocimene as a precursor for biocompatible, transparent, thermally-stable dielectric and encapsulating layers for organic electronics

Bazaka

Destefani

Jacob

2016

Sci Rep

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This article presents low-temperature, one-step dry synthesis of optically transparent thermally-stable, biocompatible cis−β−ocimene-based thin films for applications as interlayer dielectric and encapsulating layer for flexible electronic devices, e.g. OLEDs. Morphological analysis of thin films shows uniform, very smooth (Rq < 1 nm) and defect-free moderately hydrophilic surfaces. The films are optically transparent, with a refractive index of ~1.58 at 600 nm, an optical band gap of ~2.85 eV, and dielectric constant of 3.5−3.6 at 1 kHz. Upon heating, thin films are chemically and optically stable up to at least 200 °C, where thermal stability increases for films manufactured at higher RF power as well as for films deposited away from the plasma glow. Heating of the sample increases the dielectric constant, from 3.7 (25 °C) to 4.7 (120 °C) at 1 kHz for polymer fabricated at 25 W. Polymers are biocompatible with non-adherent THP–1 cells and adherent mouse macrophage cells, including LPS-stimulated macrophages, and maintain their material properties after 48 h of immersion into simulated body fluid. The versatile nature of the films fabricated in this study may be exploited in next-generation consumer electronics and energy technologies.

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Section: Resultssupporting

confidence: 75%

Section: Resultsmentioning

confidence: 99%

Plant-derived cis-β-ocimene as a precursor for biocompatible, transparent, thermally-stable dielectric and encapsulating layers for organic electronics

Bazaka

Destefani

Jacob

2016

Sci Rep

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“…Low pressure plasma enhanced chemical vapor deposition (PECVD) is nowadays one of the most widespread tools for the effective coatings deposition on substrates . Several studies have been already performed with the aim to investigate the characteristics of plasma‐polymerized acrylic acid (pPAA) films deposited by means of PECVD technology.…”

Section: Introductionmentioning

confidence: 99%

Deposition of Plasma‐Polymerized Polyacrylic Acid Coatings by a Non‐Equilibrium Atmospheric Pressure Nanopulsed Plasma Jet

Liguori

Pollicino

Stancampiano

et al. 2015

Plasma Processes & Polymers

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Successful plasma-polymerization of acrylic acid (AA), aimed at depositing plasmapolymerized polyacrylic acid (pPAA) coatings stable upon water contact with a high amount of carboxyl groups, using a non-equilibrium atmospheric pressure nanopulsed plasma jet is reported. Special attention is devoted to the surface chemical characterization of the pPAA coatings deposited on pristine and plasma pretreated polymeric substrates. The investigation of the pPAA chemical structure is performed by means of attenuated total reflectance-Fourier transform infrared and X-ray photoelectron spectroscopies. Insights on the morphological characteristics of the coatings are also provided by optical microscopy.

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“…In this case, the dielectric permittivity also increases with increasing the plasma power. Recently, an analogous study was carried out for plasma polymerized films using benzene and octaflurocyclobutane as monomers 13. Up to now, the mechanism of plasma polymerization is poorly understood.…”

Section: Introductionmentioning

confidence: 99%

Structure of Plasma‐Deposited Poly(acrylic acid) Films

Fahmy

Mix

Schönhals

et al. 2011

Plasma Processes & Polymers

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Poly(acrylic acid) films with a thickness of about 150 nm were deposited using a pulsed plasma onto aluminum and glass. The structure/property relationships of these samples were studied in dependence to the duty cycle (DC) of the plasma by a broad combination of different techniques and probes. For the first time, volume sensitive methods (FTIR, dielectric spectroscopy, and differential scanning calorimetry) are combined with surface analyses i.e. XPS. For an unambiguous identification of COOH groups by XPS, derivatization with trifluoroethanol was accomplished. Quantitative FTIR investigations give qualitatively a dependence of the concentration of COOH groups upon DC similar to that given by XPS investigations. The observed differences are discussed considering the different analytical depths of both methods. The dielectric measurements reveal that the structure of the plasma deposited films is different from that of the bulk material. Moreover, these measurements show also that the plasma deposited films are not thermally stable but undergo a post plasma chemical reaction during heating, where the reaction kinetics depends on DC.

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The relationship between chemical structure and dielectric properties of plasma-enhanced chemical vapor deposited polymer thin films

Cited by 53 publications

References 31 publications

Plant-derived cis-β-ocimene as a precursor for biocompatible, transparent, thermally-stable dielectric and encapsulating layers for organic electronics

Plant-derived cis-β-ocimene as a precursor for biocompatible, transparent, thermally-stable dielectric and encapsulating layers for organic electronics

Deposition of Plasma‐Polymerized Polyacrylic Acid Coatings by a Non‐Equilibrium Atmospheric Pressure Nanopulsed Plasma Jet

Structure of Plasma‐Deposited Poly(acrylic acid) Films

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