The Publications Committee

LaQue, F. L.

doi:10.5006/0010-9312-7.12.409

Cited by 6 publications

(14 citation statements)

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“…LaQue [11] believes this to be about 4 years for industrial sites and about 8 years for marine atmospheres. Corrosion will, of course, continue, but at a reduced rate.…”

Section: B Methods Of Testing Corrosion Ratesmentioning

confidence: 99%

“…The American Society for Testing Materials has standardized the exposure of steel specimens at an angle of 30 deg from the horizontal with the racks facing south. LaQue [11] notes that this permits washing of corrosive compounds from the upper surfaces and frequent drying by the sun to enhance the protective quality of rust films. In an industrial atmosphere, 60 per cent of the corrosion occurs on the groundward side and 40 per cent on the skyward side of the samples.…”

Section: B Methods Of Testing Corrosion Ratesmentioning

confidence: 99%

“…The most noble metals include platinum, gold, graphite, and silver, while the least noble include magnesium, zinc, cadmium, steel, and iron. LaQue [11] is of the opinion that "the mechanisms involved in galvanic corrosion are extremely complicated and appear to become more rather than less so as the subject is investigated more intensively." Nevertheless, studies over the last 50 years have produced a number of generally accepted results that have direct bearing on atmospheric corrosion.…”

Section: The Chemistry Of Metal Corrosionmentioning

confidence: 99%

“…(d) The strength of the galvanic current is partially dependent upon the relative sizes of the anode and cathode. A small anode and a large cathode present the most dangerous combination because the hydrogen ions can be converted with relative ease to hydrogen gas because of the large cathode surface [11]. As an example, small copper filings falling on an iron surface will not generate much galvanic action; small iron filings on a copper surface, on the other hand, produce rapid decomposition of the iron in the presence of water.…”

Section: The Chemistry Of Metal Corrosionmentioning

confidence: 99%

“…It follows that if small metallic particles from a stack gas fall on a metallic surface, the electrolytic corrosion will be negligible; however, if the particles are of a less noble metal, they themselves will corrode and cause an unsightly stain. (e) The size of an atmospheric electrolytic cell is very small, perhaps three sixteenths of an inch [11]. Thus, we are very much in the realm of micrometeorology.…”

Section: The Chemistry Of Metal Corrosionmentioning

confidence: 99%

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Engineering Meteorology: The Weathering of Exposed Surfaces by Atmospheric Pollution 1

Munn

1959

Bulletin of the American Meteorological Society

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The topic is approached from the viewpoint of community air-pollution programs and control. After a brief discussion of the economic costs of atmospheric pollution in an industrial area, a skeleton outline of the important factors in weathering by pollutants is presented. A few of the factors are considered in detail under the general headings of soiling, erosion, and corrosion.Significant differences in weathering are found for industrial, rural, marine, and very dry climates. Most community surveys include routine tests of the dirtiness of the air but exclude corrosion tests, although this factor is of great economic importance.Methods of corrosion testing are considered, and it is concluded that they are not feasible yet for community surveys. Increasing interest in corrosion, however, is undoubtedly leading to a broader understanding of the problem.

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“…LaQue [11] believes this to be about 4 years for industrial sites and about 8 years for marine atmospheres. Corrosion will, of course, continue, but at a reduced rate.…”

Section: B Methods Of Testing Corrosion Ratesmentioning

confidence: 99%

Section: B Methods Of Testing Corrosion Ratesmentioning

confidence: 99%

Section: The Chemistry Of Metal Corrosionmentioning

confidence: 99%

Section: The Chemistry Of Metal Corrosionmentioning

confidence: 99%

Section: The Chemistry Of Metal Corrosionmentioning

confidence: 99%

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Engineering Meteorology: The Weathering of Exposed Surfaces by Atmospheric Pollution 1

Munn

1959

Bulletin of the American Meteorological Society

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Atmospheric corrosion data of weathering steels. A review

Morcillo¹,

Chico²,

Díaz³

et al. 2013

Corrosion Science

324

161

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Extensive information on the atmospheric corrosion of weathering steel has been published in the scientific literature. The contribution of the present work is to provide a bibliographic review of the reported information, which mostly concerns the weathering steel ASTM A-242. This review addresses issues such as rust layer stabilisation times, steady-state steel corrosion rates, and situations where the use of unpainted weathering steel is feasible. It also analyses the effect of exposure conditions. Finally it approaches the important matter of predicting the long-term behaviour of weathering steel reviewing the different prediction models published in the literature.

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Cl Level Effects on Corrosion for Various Metallization Systems

Parekh

Price

1990

J. Electrochem. Soc.

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Various metallization schemes are used to provide conducting layers in IC fabrication. X-ray fluorescence spectrometry has been utilized to examine the chlorine and fluorine levels in some of these metallization schemes after patterning and etching. The metallization systems investigated include A1-Si and A1-Si-Cu, with and without TiW. The corrosion characteristics of these metallizations are found to be predominantly a function of chlorine levels. The galvanic cell effects of the Cu and TiW with A1 are not significant within the range of etch processes investigated. The effect of different in situ passivations as well as various postetch treatments are presented. The residual chlorine levels at various stages of the pattern definition process are also presented.As device geometries continue to shrink, the use of A1-Si-Cu combined with TiW is fast becoming the metallization system of choice to meet required reliability and electromigration specifications. The pattern definition of A1-Si-Cu alloys is currently done by reactive ion etching or plasma etching in chlorine containing plasmas. One of the primary concerns with this process is postetch corrosion.Postetch corrosion is believed to be due to high levels of AIC13 on the metal. AIC13 is hygroscopic and in a humid environment will react with atmospheric moisture to form HC1. This is a self-perpetuating reaction as the HC1 product can further attack A1 and produce more A1CI~, with the rate depending on the moisture content and the residual C1 level (1, 2). Chloride ions have also been reported to accelerate intergranular or pitting corrosion in bulk metals (3,4).The introduction of Cu or TiW to the A1-Si metallization system has been reported to enhance the corrosion of A1 (5-7). The suggested mechanisms are the increase in C1 levels due to the presence of the TiW or Cu and/or the galvanic cell effects of TiW or Cu with A1. It has also been suggested that the C1 and moisture levels needed to induce corrosion are much lower when Cu is present (1).In the past Auger analysis (6) has been used for the analysis of chlorine. In this paper, wavelength dispersive x-ray fluorescence spectrometry (XRF) was used to determine the chlorine and fluorine levels. XRF is an established analytical technique (8) which is used in various industries requiring sensitivities of 1014 atoms/cm 2. XRF provides the advantage of nondestructive inline measurements, with sensitivities for C1 and F in the 1013 atoms/cm 2 range (if on surface) and 10 TM atoms/cm 2 (if within the layer) for the metallization thickness considered.This paper discusses the effects of chlorine levels on corrosion for an Al-l%Si-2%Cu on 10%Ti-90%W metallization scheme used in a double metal submicron CMOS process. It also correlates the magnitude of the galvanic cell corrosive effects of both the TiW and the Cu. Finally, it presents an etch passivation strategy to minimize corrosion and suggests an allowable range of chlorine levels which can be tolerated on the wafer.

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The Publications Committee

Cited by 6 publications

References 0 publications

Engineering Meteorology: The Weathering of Exposed Surfaces by Atmospheric Pollution 1

Engineering Meteorology: The Weathering of Exposed Surfaces by Atmospheric Pollution 1

Atmospheric corrosion data of weathering steels. A review

Cl Level Effects on Corrosion for Various Metallization Systems

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