The principle of a MEMS circular diaphragm mass sensor

Ismail, Razali; Burdess,; Harris,; McNeil,; Hedley, John; Chang,; Suárez, Guillaume

doi:10.1049/ic:20060447

Cited by 7 publications

(1 citation statement)

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“…The resonant frequencies of both modes are affected by temperature, but their difference is not. By monitoring the difference frequency, the mass of biological molecules attached to the surface can be determined [10].…”

Section: Introductionmentioning

confidence: 99%

Electronic Detection Strategies for a MEMS-Based Biosensor

Burnett

Harris

Ortiz

et al. 2013

J. Microelectromech. Syst.

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This work reports on the development of control electronics for a resonant mode biosensor. The laboratory demonstrated sensor initially showed a signal-to-noise ratio of −100 dB. With the application of half-frequency drive, frequency down conversion, appropriate filtering, and digital signal processing, a cost-effective electronic solution demonstrated a signalto-noise ratio of +30 dB. This paper highlights important aspects in the design of integrated solutions to microelectromechanical systems-based sensors.[ 2012-0117]Index Terms-Biosensor, digital signal processing (DSP), microelectromechanical systems (MEMS), radio frequency (RF) engineering, signal conditioning, signal processing.

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Section: Introductionmentioning

confidence: 99%

Electronic Detection Strategies for a MEMS-Based Biosensor

Burnett

Harris

Ortiz

et al. 2013

J. Microelectromech. Syst.

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Survey of Applications

Bahreyni

2009

Fabrication and Design of Resonant Microdevices

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A hybrid microfluidic system for cancer diagnosis based on MEMS biosensors

Ortiz

Keegan

Spoors

et al. 2008

2008 IEEE Biomedical Circuits and Systems Conference

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A microfluidic system for cancer diagnosis based around a core MEMS biosensor technology is presented in this paper. The principle of the MEMS biosensor is introduced and the functionalisation strategy for cancer marker recognition is described. In addition, the successful packaging and integration of functional MEMS biosensor devices are reported herein. This ongoing work represents one of the first hybrid systems to integrate a PCB packaged silicon MEMS device into a disposable microfluidic cartridge

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The principle of a MEMS circular diaphragm mass sensor

Cited by 7 publications

References 0 publications

Electronic Detection Strategies for a MEMS-Based Biosensor

Electronic Detection Strategies for a MEMS-Based Biosensor

Survey of Applications

A hybrid microfluidic system for cancer diagnosis based on MEMS biosensors

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