Spectral beam splitting
(SBS) films are crucial for the development
of hybrid systems based on photovoltaic (PV) and concentrating solar
thermal (CST) technologies. In this study, a novel double-layer SiN
x
/Cu SBS film was prepared via magnetron sputtering.
This film was developed based on the linear Fresnel solar thermal
technology used in PV/CST hybrid systems. The as-deposited film exhibited
superior SBS properties, with a high transmittance of 72.9% and a
reflectance of 89.7%. To optimize the optical properties, the thicknesses
of the metal and SiN
x
layers were precisely
controlled. The optimal thicknesses of the Cu and SiN
x
layers were determined to be 17 and 67 nm, respectively.
Furthermore, the thermal stability of the SBS film was evaluated.
When annealed at 50 °C, the surface of the SBS film became more
uniform and smooth, and with increasing annealing time, the film became
denser. No strong diffraction peaks of Cu were observed in the X-ray
diffraction patterns because of the low content and poor crystallization
of Cu. Atomic force microscopy investigations revealed the formation
of a textured surface and a decrease in the root-mean-square roughness
with an increase in the annealing time from 0 to 360 h. As a key component
with considerable application potential in PV/CST hybrid systems,
SBS films are currently an important research topic.