The Piezo-Electric Resonator

Cady, W. G.

doi:10.1109/jrproc.1922.219800

Cited by 93 publications

(27 citation statements)

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“…Figure 1 shows equivalent mechanical and electrical models that describe the electromechanical behaviour of a piezoelectric element close to its fundamental resonance frequency. These models using electromechanical analogy have been developed in the past decades on the basis of works by Cady (1922), Van Dyke (1925), and Mason (1935). They have been used, for example, by Roundy et al (2004), Richter et al (2006), and Twiefel et al (2007) to model bimorph structures.…”

Section: Introductionmentioning

confidence: 99%

Analytical determination of characteristic frequencies and equivalent circuit parameters of a piezoelectric bimorph

Al-Ashtari

Hunstig

Hemsel

et al. 2011

Journal of Intelligent Material Systems and Structures

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Piezoelectric structures are nowadays used in many different applications. A better understanding of the influence of material properties and geometrical design on the performance of these structures helps to develop piezoelectric structures specifically designed for their application. Different equivalent circuits have been introduced in the literature to investigate the behaviour of piezoelectric transducers. The model parameters are usually determined from measurements covering the characteristic frequencies of the piezoelectric transducer. This article introduces an analytical technique for calculating the mechanical and electrical equivalent system parameters and characteristic frequencies based on material properties and geometry for a cantilever bimorph structure. The model is validated by measurements using a cantilever bimorph and fits the experimental results better than previous models. The model gives a full set of piezoelectric transducer parameters and is therefore well suited for further theoretical investigations of piezoelectric transducers for different applications. The results also show that even small manufacturing tolerances have a considerable effect on the system parameters and characteristic frequencies. This might lead to intolerable deviations, especially in dynamic applications and should be avoided by careful design and production.

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Section: Introductionmentioning

confidence: 99%

Analytical determination of characteristic frequencies and equivalent circuit parameters of a piezoelectric bimorph

Al-Ashtari

Hunstig

Hemsel

et al. 2011

Journal of Intelligent Material Systems and Structures

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“…However, since the appearance of quartz-crystal-based oscillators [1], very few conceptual innovations have been introduced. quartz crystal resonators (their frequency-determining elements) operate at the highest possible signal to noise ratio in order to minimize phase noise.…”

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confidence: 99%

Surpassing Fundamental Limits of Oscillators Using Nonlinear Resonators

et al. 2013

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In its most basic form an oscillator consists of a resonator driven on resonance, through feedback, to create a periodic signal sustained by a static energy source. The generation of a stable frequency, the basic function of oscillators, is typically achieved by increasing the amplitude of motion of the resonator while remaining within its linear, harmonic regime. Contrary to this conventional paradigm, in this Letter we show that by operating the oscillator at special points in the resonator’s anharmonic regime we can overcome fundamental limitations of oscillator performance due to thermodynamic noise as well as practical limitations due to noise from the sustaining circuit. We develop a comprehensive model that accounts for the major contributions to the phase noise of the nonlinear oscillator. Using a nano-electromechanical system based oscillator, we experimentally verify the existence of a special region in the operational parameter space that enables suppressing the most significant contributions to the oscillator’s phase noise, as predicted by our model.

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“…Quartz is an interesting material platform, widely used as a mechanical resonator in micro-electromechanical systems (MEMS) and other technologies [38]. However, lacking a native thin-film technology, it is difficult to integrate into nano-scale systems.…”

Section: Quartz Fcaementioning

confidence: 99%

Faraday cage angled-etching of nanostructures in bulk dielectrics

Latawiec

Burek

Sohn

et al. 2016

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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For many emerging optoelectronic materials, heteroepitaxial growth techniques do not offer the same high material quality afforded by bulk, single-crystal growth. However, the need for optical, electrical, or mechanical isolation at the nanoscale level often necessitates the use of a dissimilar substrate, upon which the active device layer stands. Faraday cage angled-etching (FCAE) obviates the need for these planar, thin-film technologies by enabling in-situ device release and isolation through an angled-etching process. By placing a Faraday cage around the sample during inductivelycoupled plasma reactive ion etching (ICP-RIE), the etching plasma develops an equipotential at the cage surface, directing ions normal to its face. In this Article, the effects Faraday cage angle, mesh size, and sample placement have on etch angle, uniformity, and mask selectivity are investigated within a silicon etching platform. Simulation results qualitatively confirm experiments and help to clarify the physical mechanisms at work. These results will help guide FCAE process design across a wide range of material platforms.

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The Piezo-Electric Resonator

Cited by 93 publications

References 0 publications

Analytical determination of characteristic frequencies and equivalent circuit parameters of a piezoelectric bimorph

Analytical determination of characteristic frequencies and equivalent circuit parameters of a piezoelectric bimorph

Surpassing Fundamental Limits of Oscillators Using Nonlinear Resonators

Faraday cage angled-etching of nanostructures in bulk dielectrics

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