The Oxide Film-Coated Surface Acoustic Wave Resonators for the Measurement of Relative Humidity

Alam, Shamim; Mittal, Upendra; Islam, Tarikul

doi:10.1109/tim.2021.3072108

Cited by 17 publications

(7 citation statements)

References 29 publications

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“…Based on the aforementioned proton-hopping process, the flexible humidity sensors are generally categorized into resistive, capacitive, impedance and voltage types depending on various measurement strategies. Other humidity sensors that show responses at different frequencies like quartz crystal microbalance (QCM) [ 65 , 66 ], surface acoustic wave (SAW) and Lamb wave types have been reported [ 67 , 68 ], but they are usually constructed from rigid platforms. In this section, the typical working principles of flexible humidity sensors are discussed.…”

Section: Mechanisms Of Humidity Sensorsmentioning

confidence: 99%

Multifunctional Flexible Humidity Sensor Systems Towards Noncontact Wearable Electronics

et al. 2022

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In the past decade, the global industry and research attentions on intelligent skin-like electronics have boosted their applications in diverse fields including human healthcare, Internet of Things, human–machine interfaces, artificial intelligence and soft robotics. Among them, flexible humidity sensors play a vital role in noncontact measurements relying on the unique property of rapid response to humidity change. This work presents an overview of recent advances in flexible humidity sensors using various active functional materials for contactless monitoring. Four categories of humidity sensors are highlighted based on resistive, capacitive, impedance-type and voltage-type working mechanisms. Furthermore, typical strategies including chemical doping, structural design and Joule heating are introduced to enhance the performance of humidity sensors. Drawing on the noncontact perception capability, human/plant healthcare management, human–machine interactions as well as integrated humidity sensor-based feedback systems are presented. The burgeoning innovations in this research field will benefit human society, especially during the COVID-19 epidemic, where cross-infection should be averted and contactless sensation is highly desired.

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Section: Mechanisms Of Humidity Sensorsmentioning

confidence: 99%

Multifunctional Flexible Humidity Sensor Systems Towards Noncontact Wearable Electronics

et al. 2022

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“…On the contrary, the metal oxide films were smooth, dense, and less porous, as shown in SEM and AFM images in Figure 7 a,b. Alumina (Al 2 O 3 ) is another porous ceramic material utilized as the humidity-sensing membrane for SAW devices [ 64 , 65 ].…”

Section: Sensing Materialsmentioning

confidence: 99%

Surface Acoustic Wave Humidity Sensor: A Review

et al. 2023

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The Growing demands for humidity detection in commercial and industrial applications led to the rapid development of humidity sensors based on different techniques. Surface acoustic wave (SAW) technology is one of these methods that has been found to provide a powerful platform for humidity sensing owing to its intrinsic features, including small size, high sensitivity, and simple operational mechanism. Similar to other techniques, the principle of humidity sensing in SAW devices is also realized by an overlaid sensitive film, which serves as the core element whose interaction with water molecules is responsible for overall performance. Therefore, most researchers are focused on exploring different sensing materials to achieve optimum performance characteristics. This article reviews sensing materials used to develop SAW humidity sensors and their responses based on theoretical aspects and experimental outcomes. Herein the influence of overlaid sensing film on the performance parameters of the SAW device, such as quality factor, signal amplitude, insertion loss, etc., is also highlighted. Lastly, a recommendation to minimize the significant change in device characteristics is presented, which we believe will be a good step for the future development of SAW humidity sensors.

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“…There are also impedance-based humidity sensors, but they are much less common. Other humidity sensors that show responses at different frequencies like quartz crystal microbalance (QCM) [ 171 ], surface acoustic wave (SAW) and Lamb wave types have been reported [ 172 ], but they are usually constructed from rigid platforms.…”

Section: Configuration Of Paper-based Humidity Sensors and Mechanisms...mentioning

confidence: 99%

Paper-Based Humidity Sensors as Promising Flexible Devices: State of the Art: Part 1. General Consideration

Korotcenkov

2023

Nanomaterials

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In the first part of the review article “General considerations” we give information about conventional flexible platforms and consider the advantages and disadvantages of paper when used in humidity sensors, both as a substrate and as a humidity-sensitive material. This consideration shows that paper, especially nanopaper, is a very promising material for the development of low-cost flexible humidity sensors suitable for a wide range of applications. Various humidity-sensitive materials suitable for use in paper-based sensors are analyzed and the humidity-sensitive characteristics of paper and other humidity-sensitive materials are compared. Various configurations of humidity sensors that can be developed on the basis of paper are considered, and a description of the mechanisms of their operation is given. Next, we discuss the manufacturing features of paper-based humidity sensors. The main attention is paid to the consideration of such problems as patterning and electrode formation. It is shown that printing technologies are the most suitable for mass production of paper-based flexible humidity sensors. At the same time, these technologies are effective both in the formation of a humidity-sensitive layer and in the manufacture of electrodes.

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The Oxide Film-Coated Surface Acoustic Wave Resonators for the Measurement of Relative Humidity

Cited by 17 publications

References 29 publications

Multifunctional Flexible Humidity Sensor Systems Towards Noncontact Wearable Electronics

Multifunctional Flexible Humidity Sensor Systems Towards Noncontact Wearable Electronics

Surface Acoustic Wave Humidity Sensor: A Review

Paper-Based Humidity Sensors as Promising Flexible Devices: State of the Art: Part 1. General Consideration

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