1999
DOI: 10.1109/20.801062
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The optimum oxidation state of AlO/sub x/ magnetic tunnel junctions

Abstract: In this paper we present results on how both the resistance and the magnetoresistance of magnetic spintunnel junctions depend on the oxidation time used to form the AIO, barrier. The bias voltage dependence of junctions with barriers created with different oxidation times is measured and found to be optimal when the oxidation time is chosen to give sufBcient oxygen for the barrier to be stoichiometric A120+ The oxygen content of the barrier was determined by Rutherford Backscattering Spectrometry and Elastic R… Show more

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Cited by 24 publications
(9 citation statements)
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“…The determination of oxygen was done using the same technique as described in a previous publication where the O content in Al-O tunnel barriers was investigated. 8 To investigate any decrease in magnetic moment due to the oxidation step involved in manufacturing a NOL multilayers of: ͑1͒ 3 nm Ta/͕2 nm Co 90 Fe 10 /NOL ͑60 s in air͖͒ nϭ6 /2 nm Co 90 Fe 10 /3 nm Ta and ͑2͒ 3 nm Ta/14 nm Co 90 Fe 10 /3 nm Ta were grown. The moment of these samples was measured via superconducting quantum interference device ͑SQUID͒ magnetometry.…”
Section: Methodsmentioning
confidence: 99%
“…The determination of oxygen was done using the same technique as described in a previous publication where the O content in Al-O tunnel barriers was investigated. 8 To investigate any decrease in magnetic moment due to the oxidation step involved in manufacturing a NOL multilayers of: ͑1͒ 3 nm Ta/͕2 nm Co 90 Fe 10 /NOL ͑60 s in air͖͒ nϭ6 /2 nm Co 90 Fe 10 /3 nm Ta and ͑2͒ 3 nm Ta/14 nm Co 90 Fe 10 /3 nm Ta were grown. The moment of these samples was measured via superconducting quantum interference device ͑SQUID͒ magnetometry.…”
Section: Methodsmentioning
confidence: 99%
“…These samples consist of 20 nm Co/1.5 nm Alϩt ox O 2 /15 nm Co on Si, with t ox varying from 5 to 600 s. Details of these measurements are described elsewhere. 11 Here, we will limit the discussion to the results. In Fig.…”
Section: Compositionmentioning
confidence: 99%
“…The oxygen content in a NOL can be determined with Rutherford backscattering spectrometry ͑RBS͒ in the same way as we did previously for very thin aluminum oxide tunnel barrier layers. 9 The measured oxygen peak areas in RBS can be quantified, yielding the data in Fig. 2.…”
Section: Buried Nol In the Pinned Layermentioning
confidence: 99%