The Optimum Fabrication Condition of p-Type Antimony Tin Oxide Thin Films Prepared by DC Magnetron Sputtering

Abstract

Transparent Sb-doped tin oxide (ATO) thin films were fabricated on quartz glass substrates via a mixed (SnO2+ Sb2O3) ceramic target using direct current (DC) magnetron sputtering in ambient Ar gas at a working pressure of 2 × 10−3 torr. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Hall-effect, and UV-vis spectra measurements were performed to characterize the deposited films. The substrate temperature of the films was investigated in two ways: (1) films were annealed in Ar ambient gas after being deposited at room temperature or (2) they were deposited directly at different temperatures. The first process for fabricating the ATO films was found to be easier than the second process. The deposited films showed p-type electrical properties, a polycrystalline tetragonal rutile structure, and their average transmittance was greater than 80% in the visible light range at the optimum annealing temperature of 500°C. The best electrical properties of the film were obtained on a 10 wt% Sb2O3-doped SnO2target with a resistivity, hole concentration, and Hall mobility of 0.55 Ω·cm, 1.2 × 1019 cm−3, and 0.54 cm2V−1s−1, respectively.

Warm/Cool Feeling Characteristics of Ceramic-Incorporated Fabrics: Process, Characterization, and Thermal Properties

“…On the other hand, many studies [51][52][53][54][55][56][57][58][59][60][61][62] using various ceramic particles to improve UV protection and anti-static characteristics of the fabrics have been conducted with fabrics coated with different ceramic powders. Of these studies, some studies [51,52] examined the increase of the effectiveness of UV protection by coating treatment of TiO 2 and others [53][54][55] reported more efficient UV protection of ZnO-coated fabric than conventional one.…”

Manufacturing and Properties of Various Ceramic-Embedded Composite Fabrics for Protective Clothing in Gas and Oil Industries Part II: Thermal Wear Comfort via Thermal Manikin

“…Many studies [14][15][16][17][18][19][20][21][22][23][24][25][26][27] to improve ultraviolet (UV)-protection and anti-static properties have been carried out using various ceramic-particle-embedded and coated fabrics treated with various ceramic powders. According to previous studies [14][15][16][17][18][19][20], ZnO and TiO 2 are known to be more efficient for protecting against UV than other ceramics.…”

“…In contrast, ZnO and antimony tin oxide (ATO, Sb 2 SnO 5 ) impart excellent anti-static properties with electrically conductive properties [21,22] that effectively dissipate the static charge accumulated on the fabric surface, and ATO has heat-insulating and shielding effects [23]. In previous studies, however, the UV-protective and anti-static properties of ceramic-treated fabrics obtained via the coating method limited the durability of their functions when wearing clothing.…”

Investigation of moisture vapor permeability and thermal comfort properties of ceramic embedded fabrics for protective clothing

“…[31][32][33] In addition, ZnO and ATO (antimony tin oxide) particles provide an anti-static property because of their electrically conductive characteristics. 34,35 In particular, ATO has a thermal insulation property due to its heat shielding effect. 36 Some studies related to the various physical properties of the ZnO/ATO ceramic particle-coated materials were reported.…”