The optical properties of YF3 films

ALD of YF3 Thin Films from TiF4 and Y(thd)3 Precursors

“…Similar XRD results were reported for evaporated YF 3 thin films. [5,9] The surface morphology of the films varies depending on the growth temperature (Figs. 5 and 6).…”

“…[6] The most often used techniques have been physical vapor deposition (PVD) methods, e.g., electron beam evaporation (EBE), [4,5,[7][8][9][10] and thermal evaporation. [9,[11][12][13][14][15] Evaporation has also been applied to the fabrication of epitaxial Y x La 1-x F 3 (x ¼ 0-0.8) thin films onto GaAs substrates, [16] as well as YF 3 /ZnS/Ge/ ZnS multilayer structures on germanium substrates. [17] Because the evaporation distribution is not geometrically (and perhaps compositionally) uniform, the properties of the coating can vary spatially over the substrate holder.…”

Texture evolution and infrared optical properties of praseodymium fluoride films

“…Due to the application into excimer laser, so far the investigation on rare earth fluorides used as coating materials has been mainly concentrated on the UV and DUV optical filters. Recent developments in IR transmitting materials have clearly emphasized the role of rare earth fluoride in long-wave interference filters, such as YF 3 [4,5], LaF 3 , CeF 3 , HfF 4 , NdF 3 [5], YbF 3 [6]. However, to our best knowledge, the research related to evaporated praseodymium fluoride (PrF 3 ) film has not been published.…”

Characterization and application of cerium fluoride film in infrared antireflection coating

“…In the past two decades, more and more attentions have been paid to the rare earth fluorides, such as LaF 3 [3][4][5][6], PrF 3 [7], YbF 3 [5,6], YF 3 [3,5,6,8]. CeF 3 is an excellent fluoride with a transparent range from visible to deep ultra violet (DUV) due to its large band gap [5,9].…”