The numerical calculation of plasma beam propagation in a toroidal duct with magnetized electrons and unmagnetized ions

Alterkop, B.; Gidalevich, E.; Goldsmith, S.; Boxman, R.L.

doi:10.1088/0022-3727/29/12/015

Cited by 28 publications

(21 citation statements)

References 11 publications

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“…Among them, the kinetic models based on Vlasov equilibrium equation, hydrodynamic and drift models, and plasma optics models are used. [40][41][42][43][44][45][46] Most of the models require complicated numerical calculations, and thus many simplifying assumptions are used in the calculations. Also, the plasma optics models are widely used because of their relative simplicity and utility to analyze the ion motion through the plasma duct.…”

Section: Modelmentioning

confidence: 99%

Control of ion density distribution by magnetic traps for plasma electrons

Baranov

Romanov

Fang

et al. 2012

Journal of Applied Physics

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The effect of a magnetic field of two magnetic coils on the ion current density distribution in the setup for low-temperature plasma deposition is investigated. The substrate of 400 mm diameter is placed at a distance of 325 mm from the plasma duct exit, with the two magnetic coils mounted symmetrically under the substrate at a distance of 140 mm relative to the substrate centre. A planar probe is used to measure the ion current density distribution along the plasma flux cross-sections at distances of 150, 230, and 325 mm from the plasma duct exit. It is shown that the magnetic field strongly affects the ion current density distribution. Transparent plastic films are used to investigate qualitatively the ion density distribution profiles and the effect of the magnetic field. A theoretical model is developed to describe the interaction of the ion fluxes with the negative space charge regions associated with the magnetic trapping of the plasma electrons. Theoretical results are compared with the experimental measurements, and a reasonable agreement is demonstrated.

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Section: Modelmentioning

confidence: 99%

Control of ion density distribution by magnetic traps for plasma electrons

Baranov

Romanov

Fang

et al. 2012

Journal of Applied Physics

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“…As mentioned above, there have been numerous studies explaining plasma transport in magnetic filters, including the rigid-rotor model introduced by Morozov 32 in the 1960s (i.e., even before such structure was used for macroparticle filtering), a similar flux-tube model by Boercker and coworkers 33 , and other hydrodynamic 24,26 and diffusion 18 models. Without diminishing the value of these models, one may state that it is not obvious from any of them how an electric potential trough whose "wall height" is typically only 10-20 V is able to guide ions having kinetic energies of 20-150 eV.…”

Section: A Simplified Interpretation Of Ion Transport In Curved Filtersmentioning

confidence: 99%

“…18,[24][25][26] Modeling is not simple because the problem is three-dimensional if treated properly. Even when transient phenomena and plasma instabilities 20 are neglected, simplifying assumptions have to be made to obtain useful steady-state results.…”

Section: Introductionmentioning

confidence: 99%

Bias and self-bias of magnetic macroparticle filters for cathodic arc plasmas

Byon

Anders

2003

Journal of Applied Physics

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Curved magnetic filters are often used for the removal of macroparticles from cathodic arc plasmas. This study addresses the need to further reduce losses and improving plasma throughput. The central figure of merit is the system coefficient, κ , defined as filtered ion current normalized by the plasma-producing arc current. The coefficient κ is investigated as a function of continuous and pulsed magnetic field operation, magnetic field strength, external electric bias, and arc amplitude. It increases with positive filter bias but saturates at about 15 V for relatively low magnetic field (~10 mT), whereas stronger magnetic fields lead to higher κ with saturation at about 25 V. Further increase of positive bias reduces κ . These findings are true for both pulsed and continuous filters. Bias of pulsed filters has been realized using the voltage drop across a self-bias resistor, eliminating the need for a separate bias circuit. Almost 100 A of filtered copper ions have been obtained in pulsed mode, corresponding to 0.04 κ ≈. The results are interpreted by a simplified potential trough model.

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“…The mechanism of plasma transport is the subject of a number of papers, see, for instance, [33][34][35][36][37][38][39][40][41].…”

Section: Straight Magnetic Filtermentioning

confidence: 99%

Approaches to rid cathodic arc plasmas of macro- and nanoparticles: a review

Anders

1999

Surface and Coatings Technology

223

100

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A major obstacle for the broad application of cathodic arc plasma deposition is the presence of micro-and nanoparticles in the plasma, also often referred to as "macroparticles". This paper reviews the formation of macroparticles at cathode spots, their interaction with the arc plasma and substrate, and macroparticle separation and removal from the plasma by various filtering methods. Nineteen variants of filters are discussed, including Aksenov's classic 90°-duct filter, filters of open architecture, and the concept of stroboscopic filtering.

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The numerical calculation of plasma beam propagation in a toroidal duct with magnetized electrons and unmagnetized ions

Cited by 28 publications

References 11 publications

Control of ion density distribution by magnetic traps for plasma electrons

Control of ion density distribution by magnetic traps for plasma electrons

Bias and self-bias of magnetic macroparticle filters for cathodic arc plasmas

Approaches to rid cathodic arc plasmas of macro- and nanoparticles: a review

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