2015
DOI: 10.1088/0957-0233/26/5/055001
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The multi-position calibration of the stiffness for atomic-force microscope cantilevers based on vibration

Abstract: Calibration of the stiffness of atomic force microscope (AFM) cantilevers is critical for industry and academic research. The multi-position calibration method for AFM cantilevers based on vibration is investigated. The position providing minimum uncertainty is deduced. The validity of the multi-position approach is shown via theoretical and experimental means. We applied it to the recently developed vibration method using an AFM cantilever with a normal stiffness of 0.1 N m−1. The standard deviation of the me… Show more

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Cited by 17 publications
(15 citation statements)
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“…The gold-painting cantilever and electrode make up a parallel plate capacitor. Based on the principle of virtual work, [18][19][20] electrostatic force F e would be generated supplied by DC voltage, U s , by Eq. (2):…”
Section: Principle Of the Optical Lever Calibrationmentioning
confidence: 99%
“…The gold-painting cantilever and electrode make up a parallel plate capacitor. Based on the principle of virtual work, [18][19][20] electrostatic force F e would be generated supplied by DC voltage, U s , by Eq. (2):…”
Section: Principle Of the Optical Lever Calibrationmentioning
confidence: 99%
“…The effect of observation time could be ignored. All underlying instruments had been calibrated at China Metrology Institute [10].…”
Section: Afm Cantilever Stiffness Measurementmentioning
confidence: 99%
“…The measurement of micro/nanoforces is of great importance in both science and engineering [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15]. It is useful in the fields of precision instruments, biology [16,17], magnetic field distributions [18], distance measurement [19], and tribological properties of materials [20][21][22][23].…”
Section: Introductionmentioning
confidence: 99%
“…The drive shaft is very important in many fields, such as robotic design, force measurement system, and vessel [1][2][3][4][5]. It is an indispensable part of an automotive transmission system with the feature of high rotation speed, and less bracing transmits torque in the operation of a vehicle.…”
Section: Introductionmentioning
confidence: 99%