The modeling of the alignment sensitivity of a SAWR strain sensor to applied strain

Donohoe, B.; Geraghty, Dermot; O’Donnell, Garret E.

doi:10.1109/icsens.2011.6127138

Cited by 2 publications

(2 citation statements)

References 16 publications

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“…Numerical modeling can provide a better understanding of SAW propagating characteristics and assist designing sensor devices with better performance. Many researchers have conducted the modeling of quartz based single-layer [22] and ZnO/glass based double-layer [23] SAW strain sensors, etc. In this section, we conduct a numerical modeling for our TF-LN SAW sensor to analyze the effects of several independent factors on SAW velocity (resonant frequency), and deduce the dependence of strain sensitivity on strain alignment angle with the SAW propagation.…”

Section: Modeling Of Saw Strain Sensormentioning

confidence: 99%

Flexible dual-mode surface acoustic wave strain sensor based on crystalline LiNbO₃ thin film

Cao

Dong

et al. 2018

J. Micromech. Microeng.

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This work presents the development of flexible dual-mode surface acoustic wave (SAW) sensor based on single crystalline thin film lithium niobate (TF-LN). Numerical modeling is conducted to investigate the SAW propagation and the effects on strain sensitivity. The dependence of strain sensitivity on angles between the applied strain and SAW propagation direction is analyzed numerically and experimentally, showing that the maximum strain sensitivity is at 45° rather than longitudinal direction. 128° Y-cut TF-LN (~50 µm), obtained by micromachining technique, is utilized as the piezoelectric substrate to fabricate the SAW strain sensors with dual-mode, namely Rayleigh mode and thickness shear mode. The sensor has excellent flexibility and demonstrates remarkable capability for an ultra-wide range strain measurement up to ±3000 µε. Temperature effects on resonant frequency and strain sensitivity are investigated in the range of 25 °C-100 °C, and similar temperature characteristics are observed for the dual modes. A method of beat frequency between the dual modes is introduced which is able to eliminate the temperature effect on strain sensing, an on-chip temperature influence removing capability. All the results clearly show that this sensor exhibits great potential for applications in flexible electronics and microsystems.

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Section: Modeling Of Saw Strain Sensormentioning

confidence: 99%

Flexible dual-mode surface acoustic wave strain sensor based on crystalline LiNbO₃ thin film

Cao

Dong

et al. 2018

J. Micromech. Microeng.

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show abstract

“…Meanwhile, because of their high sensitivity and low cost, various acoustic wave devices based sensors have also been developed for sensing and monitoring applications, such as to monitor temperature [3], gases [4], humidity [5], mass [6], magnetic field [7] and ultraviolet light [8], etc. In the past decades, strain or pressure sensors based on acoustic wave devices have been explored intensively as well, such as SAW strain sensors [9][10][11]. Strain induces changes in thickness of the layer stack, hence the resonant frequency of the acoustic resonant devices working in the thickness mode.…”

Section: Introductionmentioning

confidence: 99%

Temperature calibrated on-chip dual-mode film bulk acoustic resonator pressure sensor with a sealed back-trench cavity

Xuan

Dong

et al. 2018

J. Micromech. Microeng.

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We propose an on-chip film bulk acoustic resonator (FBAR) device based pressure sensor with a simple cavity structure. By sealing the back trench cavity of the FBAR device, the FBAR device become sensitive to the outside environmental pressure. The pressure sensor possesses two resonant peaks with high quality factors and coupling coefficients, which exhibit different temperature coefficients of frequency, and could be used as on-chip temperature compensation. The results show that mode 1 resonant peak of the FBAR pressure sensor has a pressure sensitivity of 1.642 ppm kPa−1, while that of mode 2 resonant peak is 0.1764 ppm kPa−1. Both of the two resonant peaks have high pressure response linearity above 0.999 in the pressure ranges of 17 kPa to 101 kPa and 101 kPa to 400 kPa. A method for temperature calibration is provided. The pressure sensor is simple in package and small in dimension, and the output data is frequency, which can easily be transmitted wirelessly, demonstrating great potential for applications such as the tire pressure monitor system.

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The modeling of the alignment sensitivity of a SAWR strain sensor to applied strain

Cited by 2 publications

References 16 publications

Flexible dual-mode surface acoustic wave strain sensor based on crystalline LiNbO₃ thin film

Flexible dual-mode surface acoustic wave strain sensor based on crystalline LiNbO₃ thin film

Temperature calibrated on-chip dual-mode film bulk acoustic resonator pressure sensor with a sealed back-trench cavity

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The modeling of the alignment sensitivity of a SAWR strain sensor to applied strain

Cited by 2 publications

References 16 publications

Flexible dual-mode surface acoustic wave strain sensor based on crystalline LiNbO3 thin film

Flexible dual-mode surface acoustic wave strain sensor based on crystalline LiNbO3 thin film

Temperature calibrated on-chip dual-mode film bulk acoustic resonator pressure sensor with a sealed back-trench cavity

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Product

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Flexible dual-mode surface acoustic wave strain sensor based on crystalline LiNbO₃ thin film

Flexible dual-mode surface acoustic wave strain sensor based on crystalline LiNbO₃ thin film