The mirror-matrix tube: A novel light valve for projection displays

Thomas, R.N.; Guldberg, J.; Nathanson, H.C.; Malmberg, P. R.

doi:10.1109/t-ed.1975.18217

Cited by 50 publications

(8 citation statements)

References 10 publications

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“…Micro-opto-electro-mechanical (MOEMS) mirrors have a long history, with the first prototypes used in image projection dating 1975 [ 1 ]. Successful applications, however (with the important exception of the celebrated, TI-developed Digital Micromirror Device or DMD [ 2 ]), have been limited.…”

Section: Introductionmentioning

confidence: 99%

A Fast Multiobjective Optimization Strategy for Single-Axis Electromagnetic MOEMS Micromirrors

Pieri

Cilea

2017

Micromachines

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Micro-opto-electro-mechanical (MOEMS) micromirrors are an enabling technology for mobile image projectors (pico-projectors). Low size and low power are the crucial pico-projector constraints. In this work, we present a fast method for the optimization of a silicon single-axis electromagnetic torsional micromirror. In this device, external permanent magnets provide the required magnetic field, and the actuation torque is generated on a rectangular multi-loop coil microfabricated on the mirror plate. Multiple constraints link the required current through the coil, its area occupancy, the operating frequency, mirror suspension length, and magnets size. With only rather general assumptions about the magnetic field distribution and mechanical behavior, we show that a fully analytical description of the mirror electromagnetic and mechanical behavior is possible, so that the optimization targets (the assembly size, comprising the mirror and magnets, and the actuation current) can be expressed as closed functions of the design parameters. Standard multiobjective optimization algorithms can then be used for extremely fast evaluation of the trade-offs among the various optimization targets and exploration of the Pareto frontier. The error caused by model assumptions are estimated by Finite Element Method (FEM) simulations to be below a few percent points from the exact solution.

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Section: Introductionmentioning

confidence: 99%

A Fast Multiobjective Optimization Strategy for Single-Axis Electromagnetic MOEMS Micromirrors

Pieri

Cilea

2017

Micromachines

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“…MEMS based micromirror devices are applications like optical display [1,2,3], ad Communication networks [5], MEMS scanne lithography [8] and multi-object spectroscopy fabrication reported in literature involves bul of silicon and SOI wafer [10,11], two-wafer process assembly [12,13]. Bulk micromachin in term of geometric resolution and Micromachining on SOI wafer is used to o with fewer process steps but high cost of SO limitation to commercial production.…”

Section: Introductionmentioning

confidence: 99%

Low cost process for development of electrostatically actuated optical devices using gold electroplating

Kumar

Bansal

et al. 2014

2014 Annual IEEE India Conference (INDICON)

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This paper presents a low cost fabric development of electrostatically actuated optical illustrate the process -a design, fabrication iteration for digital micromirror test structures structures are fabricated on Single Crystal Silicon micromachining and gold electroplating. The maj has been on the process compatibility with c fabrication technology, lower cost, complex roughness and susceptibility of compliant str cycling during the process. The structures consist micromirrors suspended at a height of 2-5 m roughness of 22-30 nm. Vertical deflection voltage (31V) and mechanical resonance frequen within 5-10% to the simulated design. The appro to realize optical switches, light modulators, barcode readers and optical scanners.

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“…History of optical MEMS (micro electro mechanical systems) goes back to the micro mirror devices for a projection display application reported by Westinghouse Inc. in 1975 [1]. At that time, no CMOS-MEMS technology was available and hence they used cathode ray in the vacuum tube to individually address and actuate micro mirrors.…”

Section: Introductionmentioning

confidence: 99%

Lateral spread of MEMS WDM technologies

Toshiyoshi

2011

SPIE Proceedings

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Optical MEMS technologies originally developed for the WDM systems have found a wide range of lateral spreading applications. For instance, we have constructed a novel power-over-fiber type OCT endoscope by using two different wavelengths for powering an electrostatic MEMS scanner and for optical probing; this work is on the extension of a MEMS variable optical attenuator. Another example is a Fabry-Perot interferometer for wavelength filtering that has been redirected to a new use of a tunable color pixel developed in a plastic sheet of large area. We look into the diverging potential of MEMS in micro optics.

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The mirror-matrix tube: A novel light valve for projection displays

Cited by 50 publications

References 10 publications

A Fast Multiobjective Optimization Strategy for Single-Axis Electromagnetic MOEMS Micromirrors

A Fast Multiobjective Optimization Strategy for Single-Axis Electromagnetic MOEMS Micromirrors

Low cost process for development of electrostatically actuated optical devices using gold electroplating

Lateral spread of MEMS WDM technologies

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