The microstructure formation of thick Zr-based amorphous alloy with anode vibration in HClO4 solution by WECMM

Hang, Yusen; Zeng, Yongbin; Yang, Tao; Xu, Zhiheng; Xu, Kun; Wang, Huimin

doi:10.1007/s00170-021-07822-9

Cited by 2 publications

(1 citation statement)

References 25 publications

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“…Therefore, WECMM is an ideal technique to manufacture three-dimensional microstructures from pure aluminum. WECMM has been successful for fabricating high-quality three-dimensional microstructures from a wide range of materials, such as pure nickel [ 11 ], stainless steel [ 12 ], cobalt-based alloys [ 13 ], and zr-based amorphous alloys [ 14 ]. Recently, high-quality three-dimensional micromachining of pure aluminum has been achieved through WECMM, but this is possible only in short-duration WECMM [ 2 ].…”

Section: Introductionmentioning

confidence: 99%

Micro-Shaping of Pure Aluminum in Long-Duration Wire Electrochemical Micromachining Using Bipolar Nanosecond Pulses

Jia

Meng

2023

Micromachines

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With the increasing application of three-dimensional pure aluminum microstructures in micro-electromechanical systems (MEMS) and for fabricating terahertz components, high-quality micro-shaping of pure aluminum has gradually attracted attention. Recently, high-quality three-dimensional microstructures of pure aluminum with a short machining path have been obtained through wire electrochemical micromachining (WECMM), owing to its sub-micrometer-scale machining precision. However, machining accuracy and stability decrease owing to the adhesion of insoluble products on the surface of the wire electrode in long-duration WECMM, which limits the application of pure aluminum microstructures with a long machining path. In this study, the bipolar nanosecond pulses are used to improve the machining accuracy and stability in long-duration WECMM of pure aluminum. A negative voltage of −0.5 V was considered appropriate based on experimental results. Compared with the traditional WECMM using unipolar pulses, the machining accuracy of the machined micro-slit and the duration of stable machining were significantly improved in long-duration WECMM using bipolar nanosecond pulses.

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Section: Introductionmentioning

confidence: 99%

Micro-Shaping of Pure Aluminum in Long-Duration Wire Electrochemical Micromachining Using Bipolar Nanosecond Pulses

Jia

Meng

2023

Micromachines

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Microfabricating Mirror-like Surface Precision Micro-Sized Amorphous Alloy Structures Using Jet-ECM Process

Han,

Ming,

Niu

et al. 2024

Micromachines

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Amorphous alloy (AA) is a high-performance metal material generally with significantly excellent mechanical and corrosion resistance properties and thus is considered as a desirable material selection for micro-scale articles. However, the microfabrication of AA still faces a variety of technical challenges mainly because the materials are too hard to process and easily lose their original properties, although at moderately high temperatures. In this study, jet-electrolyte electrochemical machining (Jet-ECM) was proposed to microfabricate the Zr-based AA because it is a low-temperature material-removal process based on the anode dissolution mechanism. The electrochemical dissolution characteristics and material removal mechanism of AA were investigated, and then the optimal process parameters were achieved based on the evaluation of the surface morphologies, surface roughness, geometrical profile, and machining accuracy of the machined micro-dimples. Finally, the feasibility was further studied by using Jet-ECM to fabricate arrayed micro-dimples using the optimized parameters. It was found that Jet-ECM can successfully microfabricate mirror-like surface AA arrayed precision micro-dimples with significantly high dimensional accuracy and geometrical consistency. Jet-ECM is a promisingly advantageous microfabrication process for the hard-to-machine AA.

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The microstructure formation of thick Zr-based amorphous alloy with anode vibration in HClO4 solution by WECMM

Cited by 2 publications

References 25 publications

Micro-Shaping of Pure Aluminum in Long-Duration Wire Electrochemical Micromachining Using Bipolar Nanosecond Pulses

Micro-Shaping of Pure Aluminum in Long-Duration Wire Electrochemical Micromachining Using Bipolar Nanosecond Pulses

Microfabricating Mirror-like Surface Precision Micro-Sized Amorphous Alloy Structures Using Jet-ECM Process

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