The microstructure and LIDT of Nb 2 O 5 and Ta 2 O 5 optical coatings

Abromavičius, Giedrius; Buzelis, Rytis; Drazdys, Ramutis; Melninkaitis, Andrius; Miksys, D.; Sirutkaitis, Valdas; Skrebutenas, A.; Juškėnas, Remigijus; Selskis, A.

doi:10.1117/12.696259

Cited by 8 publications

(2 citation statements)

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“…To produce test layers of TiO 2 , Nb 2 O 5 , and Ta 2 O 5 with high refractive index and low absorption, we began depositing these materials reactively with IAD under the following conditions: 3 and 4 Å/s, 200 0 C chamber temperature, 400 V ion beam voltage, 600 mA ion beam current, IAD discharge gas composed of 45 sccm O 2 and neutralizer gas composed of 7 sccm argon, and varying levels of oxygen back pressure. However, these settings did not yield refractive indices as high as reported by Abromavicius et al for Nb 2 O 5 and Ta 2 O 5 [5], and we did not achieve a refractive index as high as 2.4 for TiO 2 , which we had produced in our previous study depositing TiO 2 from Ti metal [4].…”

Section: Resultscontrasting

confidence: 76%

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO₂, Nb₂O₅, or Ta₂O₅high index layers

Field¹,

Bellum²,

Kletecka³

2013

SPIE Proceedings

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Broad bandwidth coatings allow angle of incidence flexibility and accommodate spectral shifts due to aging and water absorption. Higher refractive index materials in optical coatings, such as TiO 2 , Nb 2 O 5 , and Ta 2 O 5 , can be used to achieve broader bandwidths compared to coatings that contain HfO 2 high index layers. We have identified the deposition settings that lead to the highest index, lowest absorption layers of TiO 2 , Nb 2 O 5 , and Ta 2 O 5 , via e-beam evaporation using ion-assisted deposition. We paired these high index materials with SiO 2 as the low index material to create broad bandwidth high reflection coatings centered at 1054 nm for 45 0 angle of incidence and P polarization. High reflection bandwidths as large as 231 nm were realized. Laser damage tests of these coatings using the ISO 11254 and NIF-MEL protocols are presented, which revealed that the Ta 2 O 5 /SiO 2 coating exhibits the highest resistance to laser damage, at the expense of lower bandwidth compared to the TiO 2 /SiO 2 and Nb 2 O 5 /SiO 2 coatings.

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Section: Resultscontrasting

confidence: 76%

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO₂, Nb₂O₅, or Ta₂O₅high index layers

Field¹,

Bellum²,

Kletecka³

2013

SPIE Proceedings

View full text Add to dashboard Cite

show abstract

“…To produce test layers of TiO 2 , Nb 2 O 5 , and Ta 2 O 5 with high refractive index and low absorption, we began depositing these materials reactively with IAD under the following conditions: 3 and 4 Å∕s, 200°C chamber temperature, 400 V ion beam voltage, 600 mA ion beam current, IAD discharge gas composed of 45 sccm O 2 and neutralizer gas composed of 7 sccm argon, and varying levels of oxygen back pressure. However, these settings did not yield refractive indices as high as reported by Abromavicius et al 13 for Nb 2 O 5 and Ta 2 O 5 , and we did not achieve a refractive index as high as 2.4 for TiO 2 , which we had produced in our previous study depositing TiO 2 from Ti metal. 10 In order to at least replicate the high refractive index results achieved by Abromavicius et al, we pursued their lower deposition rate of 1 Å∕s and did not use oxygen back pressure.…”

Section: Resultscontrasting

confidence: 73%

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO₂, Nb₂O₅, or Ta₂O₅high-index layers

2016

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Broad bandwidth coatings allow angle of incidence flexibility and accommodate spectral shifts due to aging and water absorption. Higher refractive index materials in optical coatings, such as TiO 2 , Nb 2 O 5 , and Ta 2 O 5 , can be used to achieve broader bandwidths compared to coatings that contain HfO 2 high index layers. We have identified the deposition settings that lead to the highest index, lowest absorption layers of TiO 2 , Nb 2 O 5 , and Ta 2 O 5 , via e-beam evaporation using ion-assisted deposition. We paired these high index materials with SiO 2 as the low index material to create broad bandwidth high reflection coatings centered at 1054 nm for 45 deg angle of incidence and P polarization. High reflection bandwidths as large as 231 nm were realized. Laser damage tests of these coatings using the ISO 11254 and NIF-MEL protocols are presented, which revealed that the Ta 2 O 5 ∕SiO 2 coating exhibits the highest resistance to laser damage, at the expense of lower bandwidth compared to the TiO 2 ∕SiO 2 and Nb 2 O 5 ∕SiO 2 coatings.

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Preparation of high laser-induced damage threshold Ta2O5 films

Fan

et al. 2014

Applied Surface Science

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The microstructure and LIDT of Nb 2 O 5 and Ta 2 O 5 optical coatings

Cited by 8 publications

References 0 publications

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO₂, Nb₂O₅, or Ta₂O₅high index layers

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO₂, Nb₂O₅, or Ta₂O₅high index layers

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO₂, Nb₂O₅, or Ta₂O₅high-index layers

Preparation of high laser-induced damage threshold Ta2O5 films

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The microstructure and LIDT of Nb 2 O 5 and Ta 2 O 5 optical coatings

Cited by 8 publications

References 0 publications

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO2, Nb2O5, or Ta2O5high index layers

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO2, Nb2O5, or Ta2O5high index layers

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO2, Nb2O5, or Ta2O5high-index layers

Preparation of high laser-induced damage threshold Ta2O5 films

Contact Info

Product

Resources

About

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO₂, Nb₂O₅, or Ta₂O₅high index layers

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO₂, Nb₂O₅, or Ta₂O₅high index layers

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO₂, Nb₂O₅, or Ta₂O₅high-index layers