Nuclear Instruments and Methods in Physics Research Section B:
1991
DOI: 10.1016/0168-583x(91)96219-b
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The MeV ion implantation system “RFQ-1000” and its applications

Akira Hirakimoto
1
,
Hiroyuki Nakanishi
2
,
Masatoshi Asari
3
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Cited by 4 publications
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