2008
DOI: 10.48550/arxiv.0811.0806
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The mechanism of ion induced amorphization in Si

H. P. Lenka,
U. M. Bhatta,
P. K. Kuiri
et al.

Abstract: Some results on damage build up in, and amorphization of, Si, induced by 25-30 keV Al − 5 , Si − 5

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