2003
DOI: 10.1016/s0257-8972(03)00190-7
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The mechanical properties and microstructure of Ti–Si–N nanocomposite films by ion plating

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Cited by 40 publications
(13 citation statements)
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“…Generally, energetic particles are extracted from plasma, a compound or alloy sputtering target, vacuum or plasma arcs, or special ion sources [290]. Various ion plating processes, for instance, arc ion plating and plasma immersion ion plating, have been used to prepare hard films and coatings, such as TiN, TiC, BN, and hydrogenated amorphous carbon (a-C:H) on different substrates [291][292][293][294][295][296][297][298]. The high hardness, low coefficient of friction and chemical inertness of these films make them attractive as potential wear-resistant coatings.…”
Section: Ion Platingmentioning
confidence: 99%
“…Generally, energetic particles are extracted from plasma, a compound or alloy sputtering target, vacuum or plasma arcs, or special ion sources [290]. Various ion plating processes, for instance, arc ion plating and plasma immersion ion plating, have been used to prepare hard films and coatings, such as TiN, TiC, BN, and hydrogenated amorphous carbon (a-C:H) on different substrates [291][292][293][294][295][296][297][298]. The high hardness, low coefficient of friction and chemical inertness of these films make them attractive as potential wear-resistant coatings.…”
Section: Ion Platingmentioning
confidence: 99%
“…In order to improve the chemical and mechanical properties of the film, intensive efforts have been made to explore multi-component materials such as Ti-Al-N and Ti-Si-N [2,3]. Ti-Si-N system is attracting much interest for its much higher hardness value and better stability at elevated temperature than the TiN coating [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…The energetic particles are generally extracted from the plasma, a compound or alloy sputtering target, vacuum/plasma arcs or special ion sources [53]. Different types of ion plating processes such as arc ion plating and plasma immersion ion plating have been used to prepare hard films and coatings such as TiN (Titanium Nitride), TiC (Titanium Carbide), BN (Boron Nitride) and hydrogenated amorphous carbon (a-C:H) on different substrates [54][55][56][57][58][59][60][61]. The high hardness, low coefficient of friction and chemical inertness of these films make them attractive as potential wear-resistant coatings.…”
Section: Surface Modification Of Metals and Alloysmentioning
confidence: 99%