The material dependence of temperature measurement resolution in thermal scanning electron microscopy

Abstract

Thermal scanning electron microscopy is a recently developed temperature mapping technique based on thermal diffuse scattering in electron backscatter diffraction in a scanning electron microscope. It provides nano-scale and non-contact temperature mapping capabilities. Due to the specific temperature sensitive mechanism inherent to this technique, the temperature resolution is highly material dependent. A thorough investigation of what material properties affect the temperature resolution is important for realizing the inherent temperature resolution limit for each material. In this paper, three material dependent parameters—the Debye-Waller B-factor temperature sensitivity, backscatter yield, and lattice constant—are shown to control the temperature resolution.

Micro- and Nanoscale Measurement Methods for Phase Change Heat Transfer on Planar and Structured Surfaces

“…Systems consisting of inert gases (Xe, Kr, Ar and Ne), tetrafluoroethane (R-134a), methanol and water vapor interacting with both a hydrophilic and hydrophobic Au substrate were characterized. Sub-10 nm spatial resolution has been achieved with a thermal scanning electron microscopy (ThSEM) technique [18], where the electron diffraction pattern of Si and other crystals is used to obtain the surface temperature. Meanwhile, environmental scanning electron microscopy (ESEM) technique has been increasingly used for studying dropwise condensation [19,20].…”

Transient and local two-phase heat transport at macro-scales to nano-scales

“…Contact-based temperature measurements are intrusive and temporally lag the transient boiling dynamics due to their relatively long thermal response times 17 . Therefore, of particular interest are some of the new, non-contact techniques for surface and fluid temperature characterization 25,[28][29][30][31][32] . However, no single method can measure all the key thermo-fluid parameters.…”