The Least-squares Algorithm for Interferograms with Random Phase Shifts

Abstract

In surface shape measurement with phase-shifting interferometry, the extraction accuracy of initial phase is significant and it will influence the correct of measurement result. A least-squares algorithm is proposed to solve the parameters of interferograms with random and known phase shifts. It can rapidly extract the initial phase, modulation amplitude and background intensity without any iteration. Numerical simulations and optical experiments are implemented to demonstrate the performance of the proposed method. The simulation and experiment results show that the presented method is effective, rapid and accurate.