“…The energetic electron-impact processes with molecules play a very important role in diverse naturally occurring and laboratory-produced phenomena. − A variety of processes, such as elastic scattering, electronic excitation, ionization, chemical dissociation, and electron capture can be induced by an electron–molecule collision. Especially, several inelastic-scattering-induced processes, including dissociative electron attachment (DEA), , dissociation ionization (DI), , and electron stimulated desorption (ESD), ,− are crucial to electron-enhanced (EE) surface reactions, which are facilitated by electronic excitations rather than thermal activation processes. For current microelectronic device applications, such EE reactions enable molecular and surface reactions at low temperatures, leading to dramatic reduction of the thermal budget for thin-film growth for back-end-of-line (BEOL) 3D integrated devices.…”