2015
DOI: 10.1016/j.nima.2015.06.046
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The ion beam sputtering facility at KURRI: Coatings for advanced neutron optical devices

Abstract: a b s t r a c tWe describe a film coating facility for the development of multilayer mirrors for use in neutron optical devices that handle slow neutron beams. Recently, we succeeded in fabricating a large neutron supermirror with high reflectivity using an ion beam sputtering system (KUR-IBS), as well as all neutron supermirrors in two neutron guide tubes at BL06 at J-PARC/MLF. We also realized a large flexible selfstanding m¼5 NiC/Ti supermirror and very small d-spacing (d ¼1.65 nm) multilayer sheets. In thi… Show more

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Cited by 39 publications
(23 citation statements)
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“…We selected a VCN beam with a wavelength of λ ≃ 3. We used m = 4 polarizing Fe/SiGe super-mirrors coated on silicon wafers by an ion beam sputtering machine 18 as the polarizer and analyzer. The polarizing efficiency was higher than 90% for neutrons with a wavelength of 5.0 nm.…”
Section: Methodsmentioning
confidence: 99%
“…We selected a VCN beam with a wavelength of λ ≃ 3. We used m = 4 polarizing Fe/SiGe super-mirrors coated on silicon wafers by an ion beam sputtering machine 18 as the polarizer and analyzer. The polarizing efficiency was higher than 90% for neutrons with a wavelength of 5.0 nm.…”
Section: Methodsmentioning
confidence: 99%
“…1). The converter was fabricated using an ion beam sputter machine at KURRI [8] and the thicknesses of the layers were estimated based on the deposition rate. 10 B 4 C converts neutrons into two ions whereas the NiC layer stabilizes the 10 B 4 C layer.…”
Section: High Spatial Resolution Nuclear Emulsion Detectormentioning
confidence: 99%
“…Details on this polishing process are given in [4,13,14]. The substrates with polished ellipsoidal surfaces are then coated with supermirrors at KURRI-IBS, whose details are found in [15].…”
Section: Diamond Cutting Of Ellipsoidal and Datum Surfacesmentioning
confidence: 99%
“…The plating is amorphous; thus, it provides surfaces with sub-nanometer roughness when polished, which is sufficiently smooth for supermirror deposition. The plating's compatibility with the supermirror coating was tested using the ion-beam sputtering facility at Kyoto University Research Reactor Institute (KURRI-IBS) [15], based on which we developed elliptic supermirrors for one-dimensional focusing [3,4].…”
Section: Introductionmentioning
confidence: 99%