2021
DOI: 10.1016/j.tsf.2021.138889
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The influence of thermal stability on the properties of Cu3N layers synthesized by pulsed magnetron sputtering method

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Cited by 8 publications
(7 citation statements)
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“…This demonstrates the over-stoichiometry of the film in terms of N content, as other authors have previously reported [ 20 , 37 , 43 ]. With regard to the mean grain size calculated, no clear trend was observed in RF power for the different sample series of gas pressures, with the values being around 27–38 nm, similar to those obtained in the literature [ 9 , 32 , 37 ]. A higher grain size was observed, as highlighted for the samples in region I; hence, a better crystal quality was expected, as confirmed in the following paragraph by the analysis of the FWHM values of the dominant peak.…”
Section: Resultssupporting
confidence: 86%
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“…This demonstrates the over-stoichiometry of the film in terms of N content, as other authors have previously reported [ 20 , 37 , 43 ]. With regard to the mean grain size calculated, no clear trend was observed in RF power for the different sample series of gas pressures, with the values being around 27–38 nm, similar to those obtained in the literature [ 9 , 32 , 37 ]. A higher grain size was observed, as highlighted for the samples in region I; hence, a better crystal quality was expected, as confirmed in the following paragraph by the analysis of the FWHM values of the dominant peak.…”
Section: Resultssupporting
confidence: 86%
“…A slight shift to a lower wavenumber was observed as the RF power increased, regardless of the gas pressure. This could be indicative of a deviation from the stoichiometric level that changed with the RF power parameter [ 32 ]. At 3.5 Pa, the main peak was widened as the RF power increased, in agreement with the data extracted from the XRD spectra (see Figure 4 ).…”
Section: Resultsmentioning
confidence: 99%
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“…The relationship in the Cu-N films between plasma composition and the modulation frequency was reported to have better control of the synthesis process, which allows for multiple possibilities in material design [36]. Similar relations have been noted in the synthesis of other materials, such as metals [31,32], oxides [60,61], and nitrides [33,36,62]. As observed in the present study, HEA coatings synthesized with a lower frequency (10 Hz) have more than twofold higher thickness.…”
Section: Eds Resultssupporting
confidence: 84%
“…The material is thermally and structurally stable at temperatures up to 200°C. [4] However, its thermal decomposition occurs in the temperature range of 100–470°C. [5] In this sense, it has been reported that at high temperatures, visible structural changes can be appreciated and they may be related to the release of pure Cu.…”
Section: Introductionmentioning
confidence: 99%