THE INFLUENCE OF OXYGEN ON THE MAGNETIC PROPERTIES OF SPUTTERED NiFe FILMS

Osawa, R.; Kimura, Masayuki; Hamaaratsu, Iwao; Yokota, Hiroshi; Funaki, H.

doi:10.3379/jmsjmag.13.s1_415

J. Magn. Soc. Jpn.

1989

DOI: 10.3379/jmsjmag.13.s1_415

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THE INFLUENCE OF OXYGEN ON THE MAGNETIC PROPERTIES OF SPUTTERED NiFe FILMS

R. Osawa

Masayuki Kimura

Iwao Hamaaratsu

et al.

Abstract: Mass spectrometry clarified the impuri ty gases generated by RF magnetron sputtering of NiFe onto continuously transported Polyomide films.Conspicuous peaks due and 0+ appeared and these increased wi th increas ing ing power.

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THE INFLUENCE OF OXYGEN ON THE MAGNETIC PROPERTIES OF SPUTTERED NiFe FILMS

Abstract: Mass spectrometry clarified the impuri ty gases generated by RF magnetron sputtering of NiFe onto continuously transported Polyomide films.Conspicuous peaks due and 0+ appeared and these increased wi th increas ing ing power.

Cited by 0 publications

References 4 publications

No citations

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