The influence of N+ beam bombardment and deposition temperature on the growth of ZrB2/WNx nanomultilayers

Li, D.J.; Tan, Ming; Liu, G.Q.; Liu, M.Y.; Deng, Xiangyun; Liu, H.; Sun, Xueliang

doi:10.1016/j.surfcoat.2010.01.034

Cited by 12 publications

(2 citation statements)

References 23 publications

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“…A proper bombarding energy of lower power is beneficial in promoting the deposition of NbB 2 and Al 2 O 3 . However, the high bombarding energy in higher power of Al 2 O 3 tends to cause radiation damage [ 18 ]. And, more energetic ions and high-energy electrons will bombard newly formed film.…”

Section: Resultsmentioning

confidence: 99%

Influence of Content of Al2O3 on Structure and Properties of Nanocomposite Nb-B-Al-O films

Liu

Dong

et al. 2015

Nanoscale Res Lett

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Nb-B-Al-O nanocomposite films with different power of Al2O3 were successfully deposited on the Si substrate via multi-target magnetron co-sputtering method. The influences of Al2O3’s content on structure and properties of obtained nanocomposite films through controlling Al2O3’s power were investigated. Increasing the power of Al2O3 can influence the bombarding energy and cause the momentum transfer of NbB2. This can lead to the decreasing content of Al2O3. Furthermore, the whole films showed monocrystalline NbB2’s (100) phase, and Al2O3 shaded from amorphous to weak cubic-crystalline when decreasing content of Al2O3. This structure and content changes were proof by X-ray diffraction (XRD) and high-resolution transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS). When NbB2 grains were far from each other in lower power of Al2O3, the whole films showed a typical nanocomposite microstructure with crystalline NbB2 grains embedded in a matrix of an amorphous Al2O3 phase. Continuing increasing the power of Al2O3, the less content of Al2O3 tended to cause crystalline of cubic-Al2O3 between the close distances of different crystalline NbB2 grains. The appearance of cubic-crystallization Al2O3 can help to raise the nanocomposite films’ mechanical properties to some extent. The maximum hardness and elastic modulus were up to 21.60 and 332.78 GPa, which were higher than the NbB2 and amorphous Al2O3 monolithic films. Furthermore, this structure change made the chemistry bond of O atom change from the existence of O-Nb, O-B, and O-Al bonds to single O-Al bond and increased the specific value of Al and O. It also influenced the hardness in higher temperature, which made the hardness variation of different Al2O3 content reduced. These results revealed that it can enhance the films’ oxidation resistance properties and keep the mechanical properties at high temperature. The study highlighted the importance of controlling the Al2O3’s content to prepare well-defined films with high mechanical properties and thermal stability.

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Section: Resultsmentioning

confidence: 99%

Influence of Content of Al2O3 on Structure and Properties of Nanocomposite Nb-B-Al-O films

Liu

Dong

et al. 2015

Nanoscale Res Lett

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“…The multi-element systems, in recent years, have received more attention in terms of further improving performance [ 1 , 2 , 3 ]. When applied properly, protective coatings on bearings, gears, cutting tools and other tribological components can extend component lifetimes.…”

Section: Introductionmentioning

confidence: 99%

Influence of N2 Partial Pressure on Structure and Mechanical Properties of TiAlN/Al2O3 Multilayers

et al. 2013

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TiAlN/Al2O3 multilayers with different Ar/N2 ratios were deposited on Sisubstrates in different N2 partial pressure by magnetron sputtering. The crystalline and multilayer structures of the multilayers were determined by a glancing angle X-ray diffractometer (XRD). A nanoindenter was used to evaluate the hardness, the elastic modulus and scratch scan of the multilayers. The chemical bonding was investigated by a X-ray Photoelectron Spectroscopy (XPS). The maximum hardness (36.3 GPa) and elastic modulus (466 GPa) of the multilayers was obtained when Ar/N2 ratio was 18:1. The TiAlN/Al2O3 multilayers were crystallized with orientation in the (111) and (311) crystallographic planes. The multilayers displayed stably plastic recovery in different Ar/N2 ratios. The scratch scan and post scan surface profiles of TiAlN/Al2O3 multilayers showed the highest critical fracture load (Lc) of 53 mN for the multilayer of Ar/N2 = 18:1. It indicated that the multilayer had better practical adhesion strength and fracture resistance.

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The Influence of Loading Rate and Hold Time on the Nano-mechanical Properties of γ-TiAl and Plasma Mo-Si-Ti Coating

Zhang

Wei

et al. 2022

J. of Materi Eng and Perform

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The influence of N+ beam bombardment and deposition temperature on the growth of ZrB2/WNx nanomultilayers

Cited by 12 publications

References 23 publications

Influence of Content of Al2O3 on Structure and Properties of Nanocomposite Nb-B-Al-O films

Influence of Content of Al2O3 on Structure and Properties of Nanocomposite Nb-B-Al-O films

Influence of N2 Partial Pressure on Structure and Mechanical Properties of TiAlN/Al2O3 Multilayers

The Influence of Loading Rate and Hold Time on the Nano-mechanical Properties of γ-TiAl and Plasma Mo-Si-Ti Coating

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