“…The uncertainty of the specified confidence is as follows: According to the previous analysis, the uncertainty of the system can be obtained by taking the horizontal stage as an example, as shown in Table 2. At the same time, it can be known whether the calibration accuracy of the vibration calibration system has been improved; the key factors are as follows: - As far as possible, the standard vibration table can minimise the error of the excitation signal, and the single frequency sinusoidal excitation signal can be realised as far as possible, namely, the distortion degree of the system, the uneven surface of the table, and the transverse motion are minimised.
- The work environment of the laser interferometer is small, and it is properly installed and designed to reduce the measurement error caused by the light path.
- The effective vibration isolation measures for the system can also reduce the vibration interference of the system and reduce the random uncertainty error of the system.
- Using more precise and advanced electronic components and instruments to reduce the influence of the system error on the calibration accuracy of the system [8].
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