The influence of different silicon adhesion interlayers on the tribological behavior of DLC thin films deposited on steel by EC-PECVD

Effect of nitrogen in the properties of diamond-like carbon (DLC) coating on Ti6Al4V substrate

“…However, as reported by Chen et al [13] and confirmed by Cemin et al [11], the high intrinsic compressive stress of the film, the high variation of the elastic coefficient, the difference in thermal expansion and the low chemical affinity between DLC and substrate difficult the adhesion process of the DLC film mainly when deposited on metallic surfaces. Thus, the use of techniques as oxide layer removal and the use of film interlayer previously to the DLC film deposition can improve this adhesion feature.…”

“…The XPS analysis showed the linear increase of the nitrogen incorporation in the a-C:H(N) film with the increase of the amount of the N 2 gas in the treatment, which caused, in general, a decrease in the amount of C-C sp 3 bonding, increasing the adhesion of the film in the substrate and not necessarily the low wear resistance of the formed film.According to Robertson [4] the DLC film that presents hydrogen concentrations between 30 and 50% receives the nomenclature of hydrogenated amorphous carbon (a-C:H), and presents lower hardness and internal stress than ta-C, facilitating the adhesion process of the film in the metallic substrates. This occurs due to sp 2 bonds formed in detriment of sp 3 bonds.The DLC films have been used in a variety of applications due to their notable properties, as protective coatings against wear and corrosion, in optical windows (optical filters), data storage hard drives, high performance automotive parts, coatings for biomedical products and electromechanical microdevices [9][10][11][12].However, as reported by Chen et al [13] and confirmed by Cemin et al [11], the high intrinsic compressive stress of the film, the high variation of the elastic coefficient, the difference in thermal expansion and the low chemical affinity between DLC and substrate difficult the adhesion process of the DLC film mainly when deposited on metallic surfaces. Thus, the use of techniques as oxide layer removal and the use of film interlayer previously to the DLC film deposition can improve this adhesion feature.…”

“…The DLC films have been used in a variety of applications due to their notable properties, as protective coatings against wear and corrosion, in optical windows (optical filters), data storage hard drives, high performance automotive parts, coatings for biomedical products and electromechanical microdevices [9][10][11][12].…”

A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings

“…Although the deposition of DLC coatings has been investigated in many studies, it still represents scientific and technological open issues [2,3]. Different techniques were employed such as PECVD (Plasma Enhanced Chemical Vapour Deposition) [4], vacuum arc [5], pulsed laser deposition [6], magnetron sputtering [7,8] etc., depending on the required properties and the use of the coatings. The wide variety of achievable properties is mainly related to the bonding configuration of carbon, the sp 3 /sp 2 ratio being a crucial parameter that defines the quality and potential use of the material.…”

Deposition temperature influence on the wear behaviour of carbon-based coatings deposited on hardened steel

“…report a comparison between the doping effects of Ti and Zr on the properties of carbon-based films produced by reactive magnetron sputtering with plasma ion implantation [20]. The influence of adhesive silicon-containing interlayers deposited at different processing temperatures (100 °C to 550 °C) and deposition periods, on the tribological behaviour of carbonbased thin films deposited on steel by EC-PECVD, was presented by F. Cemin et al [21].…”