Abstract:Abstract. The present paper deals specifically with the frequently asked question of are there any differences between classical non-actuated mode-shapes of plate-type MEMS and the electrically deformed ones obtained by the non-classical modified couple stress theory. To this end, a Kirchhoff's thin plate model together with the modified couple stress theory is considered to extract the eigenvalue problem which governs on free vibrations of the system. Using the free vibration equation of the system, it is pro… Show more
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