The influence of cell window imperfections on the calibration and measured data of two types of rotating-analyzer ellipsometers

Straaijer, A.; Hanekamp, L.J.; Bootsma, G.A.

doi:10.1016/0039-6028(80)90304-0

Cited by 4 publications

(2 citation statements)

References 12 publications

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“…For a well‐designed cell filled with air the delta offset can be very low. For a cell that is filled with a liquid, the increased refractive index of the ambient strongly enhances the offset . To prevent a delta offset, a perfect alignment of the polarizer source to cell, and of the cell to the receiver unit is needed.…”

Section: Introductionmentioning

confidence: 99%

Dealing with inaccuracies in the analysis on solvent‐induced swelling of transparent thin films using in situ spectroscopic ellipsometry in the visible wavelength range

Tempelman

Kappert

Raaijmakers

et al. 2016

Surface & Interface Analysis

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The accuracy of spectroscopic ellipsometry studies of transparent polymer films in the visible wavelength range is greatly reduced in the presence of a liquid ambient. The relatively high refractive index of a liquid ambient strongly amplifies the effects of experimental non-idealities, such as window birefringence and an unknowingly inaccurate description of the optical properties of the ambient. In particular for thin films (approximately <100 nm), the implications of even small non-idealities are substantial, and large deviations in the thickness and refractive index are found. The concurrent low root mean square error (MSE) values show that a good MSE does not show that the optical model is correct; it just shows a good agreement between the experimental and fitted data. This implies that quantitative in situ ellipsometry studies for thin films are intricate, and derived properties like sorption behaviour should be treated with caution. Here, we show that quantitative in situ ellipsometry swelling measurements in solvents require a very accurate solvent dispersion relation, a high-quality temperature control, especially to prevent temperature differences between the cell, its content and exterior ambient, and accurate quantification of window effects, in particular for polymer films with thicknesses of approximately below 100 nm, depending on the optical contrast of the polymer-solvent system.

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Section: Introductionmentioning

confidence: 99%

Dealing with inaccuracies in the analysis on solvent‐induced swelling of transparent thin films using in situ spectroscopic ellipsometry in the visible wavelength range

Tempelman

Kappert

Raaijmakers

et al. 2016

Surface & Interface Analysis

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“…These nulling ellipsometers are based on the so-called totalextinction principle; A and i~ are obtained from the component readings when the transmitted beam is totally extinguished. For a number of reasons, errors do occur in these measurements; these errors are extensively discussed by Azzam and Bashara,1' 4 Aspens, 5 Straaijer et al, 6 and…”

Section: Introductionmentioning

confidence: 99%

Systematic and random errors in rotating-analyzer ellipsometry

Nijs

Silfhout

1988

J. Opt. Soc. Am. A

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Errors and error sources occurring in rotating-analyzer ellipsometry are discussed. From general considerations it is shown that a rotating-analyzer ellipsometer is inaccurate if applied at P = 00 and in cases when 0 = 0' or where A is near 00 or 1800. Window errors, component imperfections, azimuth errors and all other errors may, to first order, be treated independently and can subsequently be added. Explicit first-order expressions for the errors 6A and 36t' caused by windows, component imperfections, and azimuth errors are derived, showing that all of them, except the window errors, are eliminated in a two-zone measurement.Higher-order errors that are due to azimuth errors are studied numerically, revealing that they are in general less than 0.10. Statistical errors are also discussed. Errors caused by noise and by correlated perturbations, i.e., periodic fluctuations of the light source, are also considered. Such periodic perturbations do cause random errors, especially when they have frequencies near 2 COA and 4 C0A.

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Spectroscopic ellipsometric investigation of clean and oxygen covered copper single crystal surfaces

Hanekamp¹,

Lisowski²,

Bootsma³

1982

Surface Science

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The influence of cell window imperfections on the calibration and measured data of two types of rotating-analyzer ellipsometers

Cited by 4 publications

References 12 publications

Dealing with inaccuracies in the analysis on solvent‐induced swelling of transparent thin films using in situ spectroscopic ellipsometry in the visible wavelength range

Dealing with inaccuracies in the analysis on solvent‐induced swelling of transparent thin films using in situ spectroscopic ellipsometry in the visible wavelength range

Systematic and random errors in rotating-analyzer ellipsometry

Spectroscopic ellipsometric investigation of clean and oxygen covered copper single crystal surfaces

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