The influence of Au‐nanoparticles presence in PDMS on microstructures creation by ion beam lithography

Abstract

3D microstructures in pure poly(dimethylsiloxane) (PDMS) and PDMS with embedded Au nanoparticles were prepared by ion beam lithography without any further etching. Two mega‐electron volts helium and 10 MeV oxygen ions were used for ion microstructuring. Parallel lines of 1 mm in length and 10 μm in thickness were fabricated for investigation of the effect of the nanoparticles presence in the polymer on the surface morphology of the created microstructures. The created microstructures were checked by optical microscope. Infrared (IR) spectrometry was used to study the effect of the ions type and fluence on the chemical changes of the material. Atomic force microscopy was used for the fine detail study as well as for checking the microstructure quality. Analysis revealed an increased radiation resistance of the nanocomposite compared to the pure PDMS. Shrinkage is proportional to the fluence, but the maximum value for both materials is limited by saturation. 3D microstructure in modified PDMS obtained at the same irradiation condition as pure PDMS is characterized by its smaller height. Obtaining the microstructure in nanocomposite of the same height as in pure PDMS by increasing the fluence can be impossible due to saturation of shrinkage and/or radiation‐induced heating of the material.

Metallic nanoparticles and hybrids of metallic nanoparticles/graphene nanomaterials for enhanced photon harvesting and charge transport in polymer and dye sensitized solar cells

“… Versatile for preparation of ionic nanoparticles of various sizes Allows for control of nanoparticles size, composition, and ion charge The morphology, composition and optical properties of produced nanoparticles can be affected by the nature of the sputtering gas [ 42 ] [ 43 ] Laser ablation Simple Allows for control of nanoparticles properties by selecting appropriate laser parameters. Capable of large-scale production Not efficient as large number of nanoparticles block the laser path and absorb laser energy [ 44 ] [ 45 ] [ 46 ] Scanning beam lithography Allows for the control of size and structure of the nanoparticles [ 47 ] [ 48 ]

Fig. 1 TEM image of Au nanoparticles.

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Recent Advances on Nanocomposite Resists With Design Functionality for Lithographic Microfabrication

“…Although this is not a photo-sensitive polymer, the inclusion of photo-initiators and additives in the formulation of PDMS has been reported to allow photo-patterning (Iojoiu et al, 2000;Bhagat et al, 2007;Cotton et al, 2011) enabling its use in the development of NCPRs. Different groups reported the preparation of PDMS-based nanocomposites containing Au NPs (Fedoruk et al, 2013;SadAbadi et al, 2013;Romanenko et al, 2020), Ag NPs (Cong and Pan, 2009), Ag nanowires (Martinez et al, 2015;Shuai et al, 2017), magnetic NFs (Chung et al, 2011) and carbon nanotubes (Khosla and Gray, 2010;Liu and Choi, 2012;Li et al, 2019a;Lee et al, 2019). PDMS nanocomposites with carbon based nanofillers was recently reviewed (Kausar, 2020).…”

“…The authors successfully applied this method to fabricate microelectrodes and diffraction gratings. Other research groups have developed PDMS-based NCMs including Au NPs (SadAbadi et al, 2013;Romanenko et al, 2020) and conductive fillers (Cong and Pan, 2009;Ozhikandathil et al, 2015) to provide the desired functionality.…”