The influence of an OTS self‐assembled monolayer on the wear‐resistant properties of polysilicon based MEMS

Baker, Mark; Li, J.

doi:10.1002/sia.2210

Cited by 35 publications

(31 citation statements)

References 14 publications

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“…However, they wear off during initial mechanical contact, resulting in surfaces that exhibit unacceptable adhesion force, friction, and wear even in dry operating environments [8][9][10]. Continual surface passivation and lubrication is essential to prevent wear, minimize friction and adhesion forces, and enable long-term operation of silicon devices over a wide temperature range.…”

Section: Introductionmentioning

confidence: 99%

In-situ Vapor-Phase Lubrication of MEMS

2007

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In-situ vapor-phase lubrication of sidewall MicroElectroMechanical System (MEMS) devices is investigated with 1-pentanol vapor. The 1-pentanol vapor successfully maintains lubricating properties between silicon contacts of MEMS devices. This is attributed to the ability of alcohol to adsorb on the silicon surface and sustain a lubricating layer, which prevents wear of the MEMS surfaces and minimizes friction. In the presence of these vapors, MEMS devices with sliding contacts operated without failure for up to a factor of 1.7 9 10 4 longer than in dry N 2 gas alone, representing a dramatic improvement in operating life. Adhesion and friction were also investigated as a function of alcohol vapor pressure. The adhesive force between microfabricated MEMS sidewall surfaces increases from *30 to *60 nN as the alcohol vapor pressure is increased from 0 to 20% of saturation, and then only slightly increases to *75 nN at 95% of saturation vapor pressure. This increase in force is well within the capabilities of even the lowest force on-chip actuators, such as electrostatic comb drives which can typically generate a few lN of force. The static friction force was found to be independent of alcohol vapor pressure within the uncertainties in the measurement.

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Section: Introductionmentioning

confidence: 99%

In-situ Vapor-Phase Lubrication of MEMS

2007

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“…In the case of medical applications the following problems present difficulties: corrosion degradation in humid environment, inflammatory reaction on implant surface and wear resistance. The solution of these problems is to use self-assembled monolayers (SAMs) as protective coatings and lubricants [15,16].…”

Section: Introductionmentioning

confidence: 99%

Tribological investigations of perfluoroalkylsilanes monolayers deposited on titanium surface

Cichomski

2012

Materials Chemistry and Physics

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“…The stiff backbone [18,19], low surface energy [19,20] and crystalline order [21,22], which ensue from this assembly, provide strong load bearing capacity [23,24] and low friction coefficient [25,26]. The monolayers are thus good lubricating options in hard disc drives [27] micro-electromechanical systems [28,29], and are known to provide excellent boundary lubrication for aluminium [30,31] when dispersed in oil. Nanotribology of these monolayers explored using atomic force microscope (AFM) has shown [27,[31][32][33] a finite friction force F 0 at zero normal load (L = 0) and a linear increase in friction force F, with normal load L, at higher normal loads.…”

Section: Heterogeneous Structure Of Monolayer and Frictionmentioning

confidence: 95%

Load Induced Microstructure Evolution and Friction in an Organic Monolayer Self-assembled on a Silicon Substrate

Khatri

Biswas

2008

Tribol Lett

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In sliding of organic self-assembled monolayer against a probe the friction force is generally found to vary linearly with normal load. Here, lateral force microscopy is used to track the physical changes at the interface brought about when an octadecyltrichlorosilane monolayer, selfassembled on a silicon wafer, is slid against a Si 3 N 4 tip in the 0-30 nN load range. Regarding a morphologically heterogeneous monolayer domain to be made up of tiles of characteristic friction forces, each tile is in a unique physical state; the variation of area fraction (in a scan area) of each tile is tracked as a function of normal load. The area averaged friction force at a load is obtained by summing the fractional forces of constituent friction tiles. The friction force obtained thus, is found to vary linearly with normal tip load. It is observed that this force is dominated by the low-friction crystalline tiles at low loads and by the high friction more amorphous tiles at high loads. This suggests that for a self-assembled monolayer the load governance of friction as implied by the Amontons Law may be attributed to the physical changes that are brought about at the interface by changing the normal load.

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The influence of an OTS self‐assembled monolayer on the wear‐resistant properties of polysilicon based MEMS

Cited by 35 publications

References 14 publications

In-situ Vapor-Phase Lubrication of MEMS

In-situ Vapor-Phase Lubrication of MEMS

Tribological investigations of perfluoroalkylsilanes monolayers deposited on titanium surface

Load Induced Microstructure Evolution and Friction in an Organic Monolayer Self-assembled on a Silicon Substrate

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