in Wiley Online Library (wileyonlinelibrary.com).Understanding the effects of water vapor on gas permeation and separation properties of MFI zeolite membranes, especially at high temperatures, is important to the applications of these zeolite membranes for chemical reactions and separation involving water vapor. The effects of water vapor on H 2 and CO 2 permeation and separation properties of ZSM-5 (Si/Al $ 80) zeolite and aluminum-free silicalite membranes were studied by comparing permeation properties of H 2 and CO 2 with the feed of equimolar H 2 /CO 2 binary and H 2 /CO 2 /H 2 O ternary mixtures in 300-550 C. For both membranes, the presence of water vapor lowers H 2 and CO 2 permeance to the same extent, resulting in negligible effect on the H 2 /CO 2 separation factor. The suppression effect of water vapor on H 2 and CO 2 permeation is larger for the less hydrophobic ZSM-5 zeolite membrane than for the hydrophobic silicalite membrane, and, for both membranes, is stronger at lower temperatures and higher water vapor partial pressures.